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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2010, vol.19, no.1 2010, vol.19, no.2 2010, vol.19, no.3 2010, vol.19, no.4 2010, vol.19, no.5 2010, vol.19, no.6

题名作者出版年年卷期
Modeling and Measurement of a Bistable Beam in a Microelectromechanical SystemMatthew R. Brake; Michael S. Baker; Nathan W. Moore; Douglas A. Crowson; John A. Mitchell; Jack E. Houston20102010, vol.19, no.6
Strain Effect of the Dielectric Constant in Silicon DioxideJian-Qiu Huang; Qing-An Huang; Ming Qin; Weijie Dong; Xiaowei Chen20102010, vol.19, no.6
Low-Power High-Speed Electromagnetic Flapping Shutters Using Trapezoidal Shutter Blades Suspended by H-Type Torsional SpringsHyun-Young Choi; Won Han; Young-Ho Cho20102010, vol.19, no.6
Vibration-Based Monitoring and Diagnosis of Dielectric Charging in RF-MEMS SwitchesJin Woo Lee; Ajit K. Mahapatro; Dimitrios Peroulis; Arvind Raman20102010, vol.19, no.6
High-Pressure Peristaltic Membrane Micropump With Temperature ControlStefan Svensson; Gunjana Sharma; Sam Ogden; Klas Hjort; Lena Klintberg20102010, vol.19, no.6
Vortex Anemometer Using MEMS Cantilever SensorPawel Zylka; Pawel Modrzynski; Pawel Janus20102010, vol.19, no.6
A High-Performance Dual-Cantilever High-Shock Accelerometer Single-Sided Micromachined in (111) Silicon WafersJiachou Wang; Xinxin Li20102010, vol.19, no.6
An Optofluidic Concept for a Tunable Micro-irisPhilipp Muller; Nils Spengler; Hans Zappe; Wolfgang Monch20102010, vol.19, no.6
Design and Fabrication of a High-Power Eyeball-Like Microactuator Using a Symmetric Piezoelectric Pusher ElementSheng-Chih Shen; Juin-Cherng Huang20102010, vol.19, no.6
A Tip-Tilt-Piston Micromirror Array for Optical Phased Array ApplicationsLei Wu; Sarah Dooley; Edward A. Watson; Paul F. McManamon; Huikai Xie20102010, vol.19, no.6
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