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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2010, vol.19, no.1 2010, vol.19, no.2 2010, vol.19, no.3 2010, vol.19, no.4 2010, vol.19, no.5 2010, vol.19, no.6

题名作者出版年年卷期
Large-Scale Silicone-Rubber-Based Optical Interconnect Packaged With FR4Dengke Cai; Andreas Neyer20102010, vol.19, no.6
Drug Particle Delivery Investigation Through a Valveless MicropumpGuoguang Su; Ramana M. Pidaparti20102010, vol.19, no.6
A Piezoelectric-Driven Three-Dimensional MEMS VOA Using Attenuation Mechanism With Combination of Rotational and Translational EffectsKah How Koh; Chengkuo Lee; Takeshi Kobayashi20102010, vol.19, no.6
Bioinspired 3-D Tactile Sensor for Minimally Invasive SurgeryYating Hu; Rakesh. B. Katragadda; Hongen Tu; Qinglong Zheng; Yuefa Li; Yong Xu20102010, vol.19, no.6
Linear High-Resolution BioMEMS Force Sensors With Large Measurement RangeJagannathan Rajagopalan; Alireza Tofangchi; M. Taher A. Saif20102010, vol.19, no.6
Parylene-Based Electrochemical-MEMS TransducersChristian A. Gutierrez; Ellis Meng20102010, vol.19, no.6
Evaluation of Oxygen Plasma and UV Ozone Methods for Cleaning of Occluded Areas in MEMS DevicesD. Adam Hook; James A. Ohlhausen; Jacqueline Krim; Michael T. Dugger20102010, vol.19, no.6
Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic PolymerDer-Song Lin; Xuefeng Zhuang; Serena H. Wong; Mario Kupnik; Butrus Thomas Khuri-Yakub20102010, vol.19, no.6
Parylene-Insulated Ultradense Microfabricated CoilsFlorian Herrault; Svyatoslav Yorish; Thomas M. Crittenden; Chang-Hyeon Ji; Mark G. Allen20102010, vol.19, no.6
An Ultra Compact Integrated Front End for Wireless Neural Recording MicrosystemsGayatri E. Perlin; Kensall D. Wise20102010, vol.19, no.6
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