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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2010, vol.19, no.1 2010, vol.19, no.2 2010, vol.19, no.3 2010, vol.19, no.4 2010, vol.19, no.5 2010, vol.19, no.6

题名作者出版年年卷期
Comb-Actuated Resonant Torsional Microscanner With Mechanical AmplificationAslihan Arslan; Dean Brown; Wyatt O. Davis; Sven Holmstrom; Sertan Kutal Gokce; Hakan Urey20102010, vol.19, no.4
Compact Low-Voltage Operation Micromirror Based on High-Vacuum Seal Technology Using Metal CanHoang Manh Chu; Takayuki Tokuda; Masafumi Kimata; Kazuhiro Hane20102010, vol.19, no.4
Accurate Temperature Monitoring in Laser-Assisted Polymer Bonding for MEMS Packaging Using an Embedded Microsensor ArrayYufei Liu; Jun Zeng; Changhai Wang20102010, vol.19, no.4
A Versatile Integration Technology of SOI-MEMS/CMOS Devices Using Microbridge Interconnection StructuresHidekuni Takao; Takehiko Ichikawa; Tooru Nakata; Kazuaki Sawada; Makoto Ishida20102010, vol.19, no.4
Device-Level Vacuum Packaging for RF MEMSM. Shahriar Rahman; Murali M. Chitteboyina; Donald P. Butler; Zeynep Celik-Butler; Sergio P. Pacheco; Ronald V. McBean20102010, vol.19, no.4
A Polymer-Based Microfluidic Platform Featuring On-Chip Actuated Hydrogel Valves for Disposable ApplicationsEmil J. Geiger; Albert P. Pisano; Frantisek Svec20102010, vol.19, no.4
Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing ApplicationsLuke Armitage Beardslee; Assim M. Addous; Stephen Heinrich; Fabien Josse; Isabelle Dufour; Oliver Brand20102010, vol.19, no.4
Miniature Monolithic Rectilinear Ion Trap Arrays by Stereolithography on Printed Circuit BoardJeffrey Daniel Maas; Paul Isaac Hendricks; Zheng Ouyang; R. Graham Cooks; William Johnson Chappell20102010, vol.19, no.4
Seesaw Relay Logic and Memory CircuitsJaeseok Jeon; Vincent Pott; Hei Kam; Rhesa Nathanael; Elad Alon; Tsu-Jae King Liu20102010, vol.19, no.4
The Nanoaquarium: A Platform for In Situ Transmission Electron Microscopy in Liquid MediaJoseph M. Grogan; Haim H. Bau20102010, vol.19, no.4
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