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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2010, vol.19, no.1
2010, vol.19, no.2
2010, vol.19, no.3
2010, vol.19, no.4
2010, vol.19, no.5
2010, vol.19, no.6
题名
作者
出版年
年卷期
Fabrication and Characterization of a Parylene-Based Three-Dimensional Microelectrode Array for Use in Retinal Prosthesis
Renxin Wang; Xianju Huang; Guangfeng Liu; Wei Wang; Fangtian Dong; Zhihong Li
2010
2010, vol.19, no.2
Characterization of Encapsulated Micromechanical Resonators Sealed and Coated With Polycrystalline SiC
Shingo Yoneoka; Christopher S. Roper; Robert N. Candler; Saurabh A. Chandorkar; Andrew B. Graham; J. Provine; Roya Maboudian; Roger T. Howe; Thomas W. Kenny
2010
2010, vol.19, no.2
Size-Based Separation of Microparticles in a Multilayered Microfluidic Device
Ki-Hwan Nam; David T. Eddington
2010
2010, vol.19, no.2
Fabrication and Application of 3-D Magnetically Driven Microtools
Yoko Yamanishi; Shinya Sakuma; Yuki Kihara; Fumihito Arai
2010
2010, vol.19, no.2
Monolithically Integrated Gas Distribution Chamber for Silicon MEMS Fuel Cells
Antonio Luque; Jose M. Moreno; Javier Brey; Charles D. Ellis; Jose M. Quero; Bogdan M. Wilamowski
2010
2010, vol.19, no.2
Microfabricated Quadrupole Mass Spectrometer With a Brubaker Prefilter
Steven Wright; Shane O'Prey; Richard R. A. Syms; Guodong Hong; Andrew S. Holmes
2010
2010, vol.19, no.2
Three-Phase Electrostatic Rotary Stepper Micromotor With a Flexural Pivot Bearing
Edin Sarajlic; Christophe Yamahata; Mauricio Cordero; Hiroyuki Fujita
2010
2010, vol.19, no.2
Microfabricated Gas Chromatography Columns With Monolayer-Protected Gold Stationary Phases
Mohammad Amin Zareian-Jahromi; Masoud Agah
2010
2010, vol.19, no.2
Integrated Behavior Simulation and Verification for a MEMS Vibratory Gyroscope Using Parametric Model Order Reduction
Honglong Chang; Yafei Zhang; Jianbing Xie; Zhiguang Zhou; Weizheng Yuan
2010
2010, vol.19, no.2
Laser-Induced High-Strain-Rate Superplastic 3-D Microforming of Metallic Thin Films
Huang Gao; Gary J. Cheng
2010
2010, vol.19, no.2
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