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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2010, vol.19, no.1 2010, vol.19, no.2 2010, vol.19, no.3 2010, vol.19, no.4 2010, vol.19, no.5 2010, vol.19, no.6

题名作者出版年年卷期
Model and Observations of Dielectric Charge in Thermally Oxidized Silicon ResonatorsGaurav Bahl; Renata Melamud; Bongsang Kim; Saurabh A. Chandorkar; James C. Salvia; Matthew A. Hopcroft; David Elata; Robert G. Hennessy; Rob N. Candler; Roger T. Howe; Thomas W. Kenny20102010, vol.19, no.1
Piezoresistive Cantilever Performance - Part II: OptimizationSung-Jin Park; Joseph C. Doll; Ali J. Rastegar; Beth L. Pruitt20102010, vol.19, no.1
Analytical Model for Comb-Capacitance Fringe FieldsHanno Hammer20102010, vol.19, no.1
11-Megapixel CMOS-Integrated SiGe Micromirror Arrays for High-End ApplicationsAnn Witvrouw; Luc Haspeslagh; Olalla Varela Pedreira; Jeroen De Coster; Ingrid De Wolf; Harrie A. C. Tilmans; Twan Bearda; Bart Schlatmann; Mark van Bommel; Marie-Christine de Nooijer; Peter H. C. Magnee; Erik Jan Lous; Marco Hagting; John Lauria20102010, vol.19, no.1
Piezoresistive Cantilever Performance - Part I: Analytical Model for SensitivitySung-Jin Park; Joseph C. Doll; Beth L. Pruitt20102010, vol.19, no.1
Real-Time Temperature Compensation of MEMS Oscillators Using an Integrated Micro-Oven and a Phase-Locked LoopJames C. Salvia; Renata Melamud; Saurabh A. Chandorkar; Scott F. Lord; Thomas W. Kenny20102010, vol.19, no.1
A Parylene Bellows Electrochemical ActuatorPo-Ying Li; Roya Sheybani; Christian A. Gutierrez; Jonathan T. W. Kuo; Ellis Meng20102010, vol.19, no.1
CMOS-MEMS Capacitive Humidity SensorNathan Lazarus; Sarah S. Bedair; Chiung-C. Lo; Gary K. Fedder20102010, vol.19, no.1
Deep-Reactive-Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Block Millimeter-Wave MEMS Phase ShiftersNutapong Somjit; Goran Stemme; Joachim Oberhammer20102010, vol.19, no.1
A Method for Wafer-Scale Encapsulation of Large Lateral Deflection MEMS DevicesAndrew B. Graham; Matthew W. Messana; Peter G. Hartwell; J. Provine; Shingo Yoneoka; Renata Melamud; Bongsang Kim; Roger T. Howe; Thomas W. Kenny20102010, vol.19, no.1
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