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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2006, vol.15, no.1 2006, vol.15, no.2 2006, vol.15, no.3 2006, vol.15, no.4 2006, vol.15, no.5 2006, vol.15, no.6

题名作者出版年年卷期
Solid Propellant Microthrusters on Silicon: Design, Modeling, Fabrication, and TestingCarole Rossi; Benoit Larangot; Phuong-Quyen Pham; Danick Briand; Nicolass F. de Rooij; Manel Puig-Vidal; Josep Samitier20062006, vol.15, no.6
Liquid Polymer Deposition on Free-Standing Microfabricated Parts for Self-AssemblyChristopher J. Morris; Harvey Ho; Babak A. Parviz20062006, vol.15, no.6
Design and Fabrication Issues in Affinity Cantilevers for bioMEMS ApplicationsNitin S. Kale; V. Ramgopal Rao20062006, vol.15, no.6
Micromachined Vibratory Diffraction Grating Scanner for Multiwavelength Collinear Laser ScanningGuangya Zhou; Fook Siong Chau20062006, vol.15, no.6
A CMOS Compatible Ultrasonic Transducer Fabricated With Deep Reactive Ion EtchingLibor Rufer; Christian C. Domingues; Salvador Mir; Valerie Petrini; Jean-Claude Jeannot; Patrick Delobelle20062006, vol.15, no.6
RF-MEMS Tunable Capacitor With 3 V Operation Using Folded Beam Piezoelectric Bimorph ActuatorTakashi Kawakubo; Toshihiko Nagano; Michihiko Nishigaki; Kazuhide Abe; Kazuhiko Itaya20062006, vol.15, no.6
Shape and Material Selection for Optimizing Flexural Vibrations in Multilayered ResonatorsDamiano Pasini20062006, vol.15, no.6
Single-Pole Eight-Throw RF MEMS Rotary SwitchSuneat Pranonsatit; Andrew S. Holmes; Ian D. Robertson; Stepan Lucyszyn20062006, vol.15, no.6
Characterization of a Dipole Surface Drive Actuator With Large Travel and ForceManu Agarwal; David T. Dutton; Jeremy A. Theil; Qing Bai; Evelyn Par; Storrs Hoen20062006, vol.15, no.6
The Effect of Design and Process Parameters on Electromechanical Coupling for a Thin-Film PZT MembraneOmar Al-Hattamleh; Jeong Cho; Robert F. Richards; David F. Bahr; Cecilia D. Richards20062006, vol.15, no.6
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