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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2007, vol.16, no.1 2007, vol.16, no.2 2007, vol.16, no.3 2007, vol.16, no.4 2007, vol.16, no.5 2007, vol.16, no.6

题名作者出版年年卷期
New 3-D Structures Fabricated on Si (hkl) Substrates by Bulk MicromachiningIrena Zubel; Malgorzata Kramkowska20072007, vol.16, no.6
All-Optical Micromirrors From Nanotube MOMS With Wavelength SelectivityShaoxin Lu; Balaji Panchapakesan20072007, vol.16, no.6
Fabrication of Cylindrical Nanopores and Nanopore Arrays in Silicon-On-Insulator SubstratesLeo Petrossian; Seth J. Wilk; Punarvasu Joshi; Sahar Hihath; Stephen M. Goodnick; Trevor J. Thornton20072007, vol.16, no.6
Modeling, Simulation, and Verification of an Advanced Micromirror Using SUGARJason Vaughn Clark; Kristofer S. J. Pister20072007, vol.16, no.6
Study of Gas Microconvection for Synthesis of Rarefaction and Nonrarefaction EffectsShripad P. Mahulikar; Heinz Herwig; Oliver Hausner20072007, vol.16, no.6
Angle-Tunable Liquid Wedge Prism Driven by ElectrowettingAtsushi Takei; Eiji Iwase; Kazunori Hoshino; Kiyoshi Matsumoto; Isao Shimoyama20072007, vol.16, no.6
A MEMS Singlet Oxygen Generator - Part II: Experimental Exploration of the Performance SpaceTyrone F. Hill; Luis Fernando Velasquez-Garcia; Benjamin A. Wilhite; W. Terry Rawlins; Seonkyung Lee; Steven J. Davis; Klavs F. Jensen; Alan H. Epstein; Carol Livermore20072007, vol.16, no.6
Microengineered Two-Dimensional Arrays of Monomode Optical FibersDominik Weiland; Marc. P. Y. Desmulliez; Markus Luetzelschwab; Alexia Missoffe; Chris Beck20072007, vol.16, no.6
Notch Root Oxide Formation During Fatigue of Poly crystalline Silicon Structural FilmsOlivier N. Pierron; Christopher L. Muhlstein20072007, vol.16, no.6
A MEMS Singlet Oxygen Generator - Part I: Device Fabrication and Proof of Concept DemonstrationLuis Fernando Velasquez-Garcia; Tyrone F. Hill; Benjamin A. Wilhite; Klavs F. Jensen; Alan H. Epstein; Carol Livermore20072007, vol.16, no.6
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