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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2011, vol.20, no.1 2011, vol.20, no.2 2011, vol.20, no.3 2011, vol.20, no.4 2011, vol.20, no.5 2011, vol.20, no.6

题名作者出版年年卷期
Maskless Grayscale Lithography Using a Positive-Tone Photodefinable Polyimide for MEMS ApplicationsJoseph H. Lake; Scott D. Cambron; Kevin M. Walsh; Shamus McNamara20112011, vol.20, no.6
Single-Crystal PMN-PT MEMS Deformable MirrorsHyunkyu Park; David A. Horsley20112011, vol.20, no.6
Scanning and Tunable Micro-Optics for Endoscopic Optical Coherence TomographyKhaled Aljasem; Luc Froehly; Andreas Seifert; Hans Zappe20112011, vol.20, no.6
Electrostatic Accumulation and Release of DNA Using a Micromachined LanceQuentin T. Aten; Brian D. Jensen; Sandra H. Burnett; Larry L. Howell20112011, vol.20, no.6
CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural RecordingKarsten Seidl; Stanislav Herwik; Tom Torfs; Herc P. Neves; Oliver Paul; Patrick Ruther20112011, vol.20, no.6
Integration of Bulk Nanoporous Elements in Microfluidic Devices With Application to Biomedical DiagnosticsFabio Fachin; Grace Dongqing Chen; Mehmet Toner; Brian L. Wardle20112011, vol.20, no.6
Monolithic Fabrication of EWOD Chips for Picoliter DropletsWyatt C. Nelson; Chang-Jin "CJ" Kim20112011, vol.20, no.6
Effect of Deposition Gas Ratio, RF Power, and Substrate Temperature on the Charging/Discharging Processes in PECVD Silicon Nitride Films for Electrostatic NEMS/MEMS Reliability Using Atomic Force MicroscopyUsama Zaghloul; George J. Papaioannou; Bharat Bhushan; Haixia Wang; Fabio Coccetti; Patrick Pons; Robert Plana20112011, vol.20, no.6
Force Rebalance Controller Synthesis for a Micromachined Vibratory Gyroscope Based on Sensitivity Margin SpecificationsJian Cui; Zhongyang Guo; Qiancheng Zhao; Zhenchuan Yang; Yilong Hao; Guizhen Yan20112011, vol.20, no.6
Q Control of an Atomic Force Microscope Microcantilever: A Sensorless ApproachMatthew W. Fairbairn; S. O. Reza Moheimani; Andrew J. Fleming20112011, vol.20, no.6
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