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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2001, vol.10, no.1 2001, vol.10, no.2 2001, vol.10, no.3 2001, vol.10, no.4

题名作者出版年年卷期
A methodology and model for the Pull-in parameters of electrostatic actuatorsYael Nemirovsky; Ofir Bochobza-Degani20012001, vol.10, no.4
High-cycle fatigue of single-crystal silicon thin filmsChristopher L. Muhlstein; Stuart B. Brown; Robert O. Ritchie20012001, vol.10, no.4
Characterization of micromechanical optical modulatorHuibing Mao; Jinghua Ke; Peisheng Xing; Zongsheng Lai20012001, vol.10, no.4
Batch-processed vacuum-sealed capacitive pressure sensorsAbhijeet V. Chavan; Kensall D. Wise20012001, vol.10, no.4
Manufacturing and packaging of sensors for their integration in a vertical MCM microsystem for biomedical applicationsAndreas Gotz; Isabel Gracia; Carles Cane; Anthony Morrissey; John Alderman20012001, vol.10, no.4
An angle-based design approach for rectangular electrostatic torsion actuatorsZhixiong Xiao; Xing Tao Wu; Wuyong Peng; K. R. Farmer20012001, vol.10, no.4
Microgimbal torsion beam design using open, thin-walled cross sectionsLilac Muller; Albert P. Pisano; Roger T. Howe20012001, vol.10, no.4
Application of a parallel DSMC technique to predict flow characteristics of microfluidic filtersOzgur Aktas N. R. Aluru; Umberto Ravaioli20012001, vol.10, no.4
Fabrication of ultrathin P{sup}(++) silicon microstructures using ion implantation and boron etch-stopChunchieh Huang; Khalil Najafi20012001, vol.10, no.4
Low-temperature wafer-level transfer bondingFrank Niklaus; Peter Enoksson; Patrick Griss; Edvard Kalvesten; Goran Stemme20012001, vol.10, no.4
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