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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2001, vol.10, no.1 2001, vol.10, no.2 2001, vol.10, no.3 2001, vol.10, no.4

题名作者出版年年卷期
Effect of specimen size on young's modulus and fracture strength of polysiliconWilliam N. Sharpe; Kamili M. Jackson; Kevin J. Hemker; Zielang Xie20012001, vol.10, no.3
Comparison of capacitive and feedback-interferometric measurements on MEMSValerio Annovazzi-Lodi; Sabina Merlo; Michele Norgia20012001, vol.10, no.3
Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMSBrian D. Jensen; Maarten P. de Boer; Nathan D. Masters; Fernando Bitsie; David A. LaVan20012001, vol.10, no.3
Mechanical property evaluation and failure analysis of cantilevered LIGA nickel micropostsLyndon S. Stephens; Kevin W. Kelly; Seshu Simhadri; Andy B. McCandless; E. I. Meletis20012001, vol.10, no.3
Thermal conductivity of doped polysilicon layersAngela D. McConnell; Srinivasan Uma; Kenneth E. Goodson20012001, vol.10, no.3
Design and batch fabrication of probes for Sub-100 nm scanning thermal microscopyLi Shi; Ohymyoung Kwon; Andrew C. Miner; Arunava Majumdar20012001, vol.10, no.3
An integrated simulator for coupled domain problems in MEMSRobert M. Kirby; George Em Karniadakis; Oleg Mikulchenko; Kartikeya Mayaram20012001, vol.10, no.3
A hermetic glass-silicon package formed using localized aluminum/silicon-glass bondingYu-Ting Cheng; Liwei Lin; Khalil Najafi20012001, vol.10, no.3
Fabrication of Air-channel structures for microfluidic, microelectromechanical, and microelectronic applicationsDhananjay Bhusari; Hollie A. Reed; Michael Wedlake; Agnes M. Padovani; Sue Ann Bidstrup Allen; Paul A. Kohl20012001, vol.10, no.3
Curvature compensation in micromirrors with high-reflectivity optical coatingsKe Cao; W. Liu; Joseph J. Talghader20012001, vol.10, no.3
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