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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2004 2005 2006 2007 2008 2009
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2009, vol.18, no.1 2009, vol.18, no.2 2009, vol.18, no.3 2009, vol.18, no.4 2009, vol.18, no.5 2009, vol.18, no.6

题名作者出版年年卷期
Wafer-Scale Manufacturing of Bulk Shape-Memory-Alloy Microactuators Based on Adhesive Bonding of Titanium-Nickel Sheets to Structured Silicon WafersStefan Braun; Niklas Sandstrom; Goran Stemme; Wouter van der Wijngaart20092009, vol.18, no.6
Stochastic Analysis of Electrostatic MEMS Subjected to Parameter VariationsNitin Agarwal; Narayana R. Alum20092009, vol.18, no.6
MEMS Vibration Energy Harvesting Devices With Passive Resonance Frequency Adaptation CapabilityMarcin Marzencki; Maxime Defosseux; Skandar Basrour20092009, vol.18, no.6
Field-Concentrator-Based Resonant Magnetic Sensor With Integrated Planar CoilsSimon Brugger; Oliver Paul20092009, vol.18, no.6
Efficient Energy Harvesting from Irregular Mechanical Vibrations by Active Motion ControlHiroshi Okamoto; Teppei Onuki; Sumito Nagasawa; Hiroki Kuwano20092009, vol.18, no.6
Temperature-Insensitive Composite Micromechanical ResonatorsRenata Melamud; Saurabh A. Chandorkar; Bongsang Kim; Hyung Kyu Lee; James C. Salvia; Gaurav Bahl; Matthew A. Hopcroft; Thomas W. Kenny20092009, vol.18, no.6
Internal Dielectric Transduction in Bulk-Mode ResonatorsDana Weinstein; Sunil A. Bhave20092009, vol.18, no.6
Nonlinear Dynamics of a Micromechanical Torsional Resonator: Analytical Model and ExperimentsDario Antonio; Hernan Pastoriza20092009, vol.18, no.6
Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated CantileversDae-Hyun Kim; Min-Wu Kim; Jin-Wan Jeon; Koeng Su Lim; Jun-Bo Yoon20092009, vol.18, no.6
A Monolithic Dual-Golor Total-Internal-Reflection-Based Chip for Highly Sensitive and High-Resolution Dual-Fluorescence ImagingNam Cao Hoai Le; Dzung Viet Dao; Ryuji Yokokawa; John C. Wells; Susumu Sugiyama20092009, vol.18, no.6
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