长垣产业园区科技文献服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2008, vol.17, no.1 2008, vol.17, no.2 2008, vol.17, no.3 2008, vol.17, no.4 2008, vol.17, no.5 2008, vol.17, no.6

题名作者出版年年卷期
Electrothermal Microgripper With Large Jaw Displacement and Integrated Force SensorsTrinh Chu Duc; Gih-Keong Lau; J. Fredrik Creemer; Pasqualina M. Sarro20082008, vol.17, no.6
Two-Layer Electroplated Microcoils With a PECVD Silicon Dioxide Interlayer DielectricDariusz Golda; Jeffrey H. Lang; Martin L. Culpepper20082008, vol.17, no.6
A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias InstabilityMohammad Faisal Zaman; Ajit Sharma; Zhili Hao; Farrokh Ayazi20082008, vol.17, no.6
Differential Scanning Calorimeter Based on Suspended Membrane Single Crystal Silicon MicrohotplateJungchul Lee; Christopher M. Spadaccini; Erik V. Mukerjee; William P. King20082008, vol.17, no.6
Electrowetting for Tunable MicroopticsFlorian Krogmann; Wolfgang Monch; Hans Zappe20082008, vol.17, no.6
Evanescent-Wave Spectroscopy Using an SU-8 Waveguide for Rapid Quantitative Detection of BiomoleculesLinan Jiang; Karl P. Gerhardt; Brian Myer; Yitshak Zohar; Stanley Pau20082008, vol.17, no.6
Hydrogenation-Assisted Lateral Micromachining of (111) Silicon WafersSara Darbari; Soheil Azimi; Shamsoddin Mohajerzadeh; Amir Sammak; Nima Izadi; Shaya Famini20082008, vol.17, no.6
Room-Temperature Fabrication of Anodic Tantalum Pentoxide for Low-Voltage Electrowetting on Dielectric (EWOD)Yifan Li; William Parkes; Les I. Haworth; Alan W. S. Ross; J. Tom M. Stevenson; Anthony J. Walton20082008, vol.17, no.6
Dynamic Synthesis of Microsystems Using the Segment Rayleigh-Ritz MethodGino Rinaldi; Muthukumaran Packirisamy; Ion Stihara20082008, vol.17, no.6
Cryogenic Performance of RF MEMS Switch ContactsChris Brown; Arthur S. Morris; Angus I. Kingon; Jacqueline Krim20082008, vol.17, no.6
12345678910...



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024