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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2008, vol.17, no.1 2008, vol.17, no.2 2008, vol.17, no.3 2008, vol.17, no.4 2008, vol.17, no.5 2008, vol.17, no.6

题名作者出版年年卷期
A Compact Squeeze-Film Model Including Inertia, Compressibility, and Rarefaction Effects for Perforated 3-D MEMS StructuresSuhas S. Mohite; Venkata R. Sonti; Rudra Pratap20082008, vol.17, no.3
Harmonic Balance Nonlinear Identification of a Capacitive Dual-Backplate MEMS MicrophoneJian Liu; David T. Martin; Toshikazu Nishida; Louis N. Cattafesta, III; Mark Sheplak; Brian P. Mann20082008, vol.17, no.3
Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone StructuresNeal A. Hall; Murat Okandan; Robert Littrell; Baris Bicen; F. Levent Degertekin20082008, vol.17, no.3
Two-Dimensional Fiber Positioning and Clamping Device for Product-Internal MicroassemblyVincent A. Henneken; Wouter P. Sassen; Wim van der Vlist; Wim H. A. Wien; Marcel Tichem; Pasqualina M. Sarro20082008, vol.17, no.3
Passive Reduced-Order Macromodeling Algorithm for Microelectromechanical SystemsRumi Zhang; Wei Wang; Anestis Dounavis; Graham A. Jullien20082008, vol.17, no.3
Micromachined RF-Coupled Cantilever Inverted-Micro strip Millimeter-Wave FiltersStepan Lucyszyn; Kenichi Miyaguchi; Hong W. Jiang; Ian D. Robertson; Gavin Fisher; Anthony Lord; Joo-Young Choi20082008, vol.17, no.3
Nanoscale Pattern Definition on Nonplanar Surfaces Using Ion Beam Proximity Lithography and Conformal Plasma-Deposited ResistDhara Parikh; Barry Craver; Hatem N. Nounu; Fu-On Fong; John C. Wolfe20082008, vol.17, no.3
Modeling of Coupled Dome-Shaped MicrooscillatorsTuhin Sahai; Alan T. Zehnder20082008, vol.17, no.3
Minimum Energy Actuation and Bounce-Back Behavior of Microbeams Using δ Voltage PulsesYuyan Wang; Joseph J. Talghader20082008, vol.17, no.3
Temperature Dependence of Quality Factor in MEMS ResonatorsBongsang Kim; Matthew A. Hopcroft; Rob N. Candler; Chandra Mohan Jha; Manu Agarwal; Renata Melamud; Saurabh A. Chandorkar; Gary Yama; Thomas W. Kenny20082008, vol.17, no.3
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