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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2012, vol.21, no.1 2012, vol.21, no.2 2012, vol.21, no.3 2012, vol.21, no.5 2012, vol.21, no.6

题名作者出版年年卷期
Ultrahigh-Dynamic-Range Resonant MEMS Load Cells for Micromechanical Test FramesKivanc Azgin; Tayfun Akin; Lorenzo Valdevit20122012, vol.21, no.6
Transverse Interdigitated Electrode Actuation of Homogeneous Bulk PZTPrakruthi Hareesh; Isaac Misri; Shuang Yang; Don L. DeVoe20122012, vol.21, no.6
Fabrication of Very-High-Aspect-Ratio Microstructures in Complex Patterns by Photoelectrochemical EtchingGuangyi Sun; Xin Zhao; Chang-Jin "CJ" Kim20122012, vol.21, no.6
Multi-Degree-of-Freedom Thin-Film PZT-Actuated Microrobotic LegChoong-Ho Rhee; Jeffrey S. Pulskamp; Ronald G. Polcawich; Kenn R. Oldham20122012, vol.21, no.6
Wafer-Level Vacuum Packaging for MEMS Resonators Using Glass Frit BondingGuoqiang Wu; Dehui Xu; Bin Xiong; Yuchen Wang; Yuelin Wang; Yinglei Ma20122012, vol.21, no.6
Effects of Fast Neutrons on the Electromechanical Properties of Materials Used in MicrosystemsPetros Gkotsis; Valeriya Kilchytska; Charalampos Fragkiadakis; Paul B. Kirby; Jean-Pierre Raskin; Laurent A. Francis20122012, vol.21, no.6
Design and Demonstration of an In-Plane Silicon-on-Insulator Optical MEMS Fabry-Perot-Based Accelerometer Integrated With Channel WaveguidesKazem Zandi; Joseph Andre Belanger; Yves-Alain Peter20122012, vol.21, no.6
Thin-Film Piezoelectric MEMS Transducer Suitable for Middle-Ear Audio ProsthesesHumberto Campanella; Carlos J. Camargo; Javier Lopez Garcia; Alberto Daza; Rafael Urquiza; Jaume Esteve20122012, vol.21, no.6
Stress-Driven and Carbon-Assisted Growth of SiO_xN_y Nanowires on Photoresist-Derived Carbon MicroelectrodeLei Zhang; Tielin Shi; Zirong Tang; Dan Liu; Shuang Xi20122012, vol.21, no.6
Isotropic Silicon Etching With XeF_2 Gas for Wafer-Level Micromachining ApplicationsDehui Xu; Bin Xiong; Guoqiang Wu; Yuchen Wang; Xiao Sun; Yuelin Wang20122012, vol.21, no.6
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