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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2012, vol.21, no.1 2012, vol.21, no.2 2012, vol.21, no.3 2012, vol.21, no.5 2012, vol.21, no.6

题名作者出版年年卷期
Mechanical Design and Characterization for MEMS Thin-Film PackagingFabio Santagata; Jeroen J. M. Zaal; Victor Gonzalez Huerta; Luigi Mele; J. Fredrik Creemer; Pasqualina M. Sarro20122012, vol.21, no.1
RF MEMS Fractal Capacitors With High Self-Resonant FrequenciesAmro M. Elshurafa; Ahmed G. Radwan; Ahmed Emira; Khaled N. Salama20122012, vol.21, no.1
Poly-SiGe-Based MEMS Thin-Film EncapsulationBin Guo; Bo Wang; Lianggong Wen; Philippe Helin; Gert Claes; Jeroen De Coster; Bert Du Bois; Agnes Verbist; Rita Van Hoof; Guy Vereecke; Luc Haspeslagh; Harrie A. C. Tilmans; Stefaan Decoutere; Haris Osman; Robert Puers; Ingrid De Wolf; Shuji Tanaka20122012, vol.21, no.1
A Thermoelectric Power Sensor and Its Package Based on MEMS TechnologyDe-Bo Wang; Xiao-Ping Liao; Tong Liu20122012, vol.21, no.1
Novel First-Level Interconnect Techniques for Flip Chip on MEMS DevicesJemmy Sutanto; Sindhu Anand; Chetan Patel; Jit Muthuswamy20122012, vol.21, no.1
A 2 Degree-of-Freedom SOI-MEMS Translation Stage With Closed-Loop PositioningBonjin Koo; Xuemeng Zhang; Jingyan Dong; Srinivasa M. Salapaka; Placid M. Ferreira20122012, vol.21, no.1
Parametric Study of Zigzag Microstructure for Vibrational Energy HarvestingM. Amin Karami; Daniel J. Inman20122012, vol.21, no.1
An Analytical Capacitance Model of Temperature-Sensitive, Large-Displacement Multimorph Cantilevers: Numerical and Experimental ValidationSean Scott; Jeong-Il Kim; Farshid Sadeghi; Dimitrios Peroulis20122012, vol.21, no.1
Cylindrical Surfaces Enable Wavelength-Selective Extinction and Sub-0.2 nm Linewidth in 250 μm-Gap Silicon Fabry-Perot CavitiesMaurine Malak; Frederic Marty; Nicolas Pavy; Yves-Alain Peter; Ai-Qun Liu; Tarik Bourouina20122012, vol.21, no.1
Fabrication and Analysis of a MEMS NIR Fabry-Perot InterferometerTimothy J. Russin; Maxwell Kerber; Alicia Russin; Andrew Wang; Richard Waters20122012, vol.21, no.1
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