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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1999, vol.8, no.1 1999, vol.8, no.2 1999, vol.8, no.3 1999, vol.8, no.4

题名作者出版年年卷期
Working equations for piezoelectric actuators and sensorsMarc S. Weinberg19991999, vol.8, no.4
The surface/bulk micromachining (SBM) process: a new method for fabricating released MEMS in single crystal siliconSangwoo Lee; Sangjun Park; Dong-il (Dan) Cho19991999, vol.8, no.4
Surface tension powered self-assembly of 3-D micro-optomechanical structuresRichard R. A. Syms19991999, vol.8, no.4
Strongly buckled square micromachined membranesVolker Ziebart; Oliver Paul; Henry Baltes19991999, vol.8, no.4
Phase change in micro channel heat sinks with integrated temperature sensorsLinan Jiang; Man Wong; Yitshak Zohar19991999, vol.8, no.4
Pattern transfer by direct photo etching of poly(vinylidene fluoride) using X raysHarish M. Manohara; Eizi Morikawa; Jaewu Choi; Phillip T. Sprunger19991999, vol.8, no.4
Optical properties of surface micromachined mirrors with etch holesJun Zou; Michal Balberg; Colin Byrne; Chang Liu; David J. Brady19991999, vol.8, no.4
Low-noise MEMS vibration sensor for geophysical applicationsJonathan Bernstein; Raanan Miller; William Kelley; Paul Ward19991999, vol.8, no.4
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuatorJer-Liang Andrew Yeh; Hongrui Jiang; Norman C. Tien19991999, vol.8, no.4
Influence of mechanical stress on the offset voltage of hall devices operated with spinning current methodRalph Steiner; Christoph Maier; Michael Mayer; Sandra Bellekom; Henry Baltes19991999, vol.8, no.4
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