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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2002, vol.11, no.1 2002, vol.11, no.2 2002, vol.11, no.3 2002, vol.11, no.4 2002, vol.11, no.5 2002, vol.11, no.6

题名作者出版年年卷期
Investigation of strain in microstructures by a novel moire methodBiao Li; Huimin Xie; Bai Xu; Robert Geer; James Castracane20022002, vol.11, no.6
Tunable optical filter of porous silicon as key component for a MEMS spectrometerGerhard Lammel; Sandra Schweizer; Sebastien Schiesser; Philippe Renaud20022002, vol.11, no.6
V-band reflection-type phase shifters using micromachined CPW coupler and RF switchesJae-Hyoung Park; Hong-Teuk Kim; Wooyeol Choi; Youngwoo Kwon; Yong-Kweon Kim20022002, vol.11, no.6
Electrically tunable collective response in a coupled micromechanical arrayEyal Buks; Michael L. Roukes20022002, vol.11, no.6
Piezoresistive accelerometers for MCM packageJose A. Plaza; Ana Collado; Enric Cabruja; Jaume Esteve20022002, vol.11, no.6
A vacuum packaged surface micromachined resonant accelerometerAshwin A. Seshia; Moorthi Palaniapan; Trey A. Roessig; Roger T. Howe; Roland W. Gooch; Thomas R. Schimert; Stephen Montague20022002, vol.11, no.6
Energy dissipation in submicrometer thick single-crystal silicon cantileversJinling Yang; Takahito Ono; Masayoshi Esashi20022002, vol.11, no.6
Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operationWilliam P. King; Thomas W. Kenny; Kenneth E. Goodson; Graham L. W. Cross; Michel Despont; Urs T. Durig; Hugo Rothuizen; Gerd Binnig; Peter Vettiger20022002, vol.11, no.6
Mechanics of microcantilever beams subject to combined electrostatic and adhesive forcesJames A. Knapp; Maarten P. de Boer20022002, vol.11, no.6
Integrated measurement-modeling approaches for evaluating residual stress using micromachined fixed-fixed beamsMichael S. Baker; Maarten P. de Boer; Norman F. Smith; Larry K. Warne; Michael B. Sinclair20022002, vol.11, no.6
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