长垣产业园区科技文献服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2002, vol.11, no.1 2002, vol.11, no.2 2002, vol.11, no.3 2002, vol.11, no.4 2002, vol.11, no.5 2002, vol.11, no.6

题名作者出版年年卷期
Direct silicon-silicon bonding by electromagnetic induction heatingKeith Thompson; Yogesh B. Gianchandani; John Booske; Reid F. Cooper20022002, vol.11, no.4
Electroless nickel films: properties and fabricated cavity structureSeung Hwan Yi; Fred J. Von Preissig; Eun Sok Kim20022002, vol.11, no.4
Electrostatic actuation of microscale liquid-metal dropletsLaurent Latorre; Joonwon Kim; Junghoon Lee; Peter-Patrick de Guzman; Hyesog J. Lee; Pascal Nouet; Chang-Jin Kim20022002, vol.11, no.4
A new in situ residual stress measurement method for a MEMS thin fixed-fixed beam structureShea Chen; Terry V. Baughn; Zhimin Jamie Yao; Charles L. Goldsmith20022002, vol.11, no.4
Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopyRandal J. Grow; Stephen C. Minne; Scott R. Manalis; Calvin F. Quate20022002, vol.11, no.4
IR uncooled bolometers based on amorphous Ge{sub}xSi{sub}(1-x)O{sub}y on silicon micromachined structuresEnrique Iborra; Marta Clement; Lucia Vergara Herrero; Jesus Sangrador20022002, vol.11, no.4
Single mask, large force, and large displacement electrostatic linear inchworm motorsRichard Yeh; Seth Hollar; Kristofer S. J. Pister20022002, vol.11, no.4
Wireless micromachined ceramic pressure sensor for high-temperature applicationsMichael A. Fonseca; Jennifer M. English; Martin Von Arx; Mark G. Allen20022002, vol.11, no.4
Feasibility test of an electromagnetically driven valve actuator for glaucoma treatmentByunghoon Bae; Nakhoon Kim; Hongseok Kee; Seon-Ho Kim; Yeon Lee; Sangho Lee; Kyihwan Park20022002, vol.11, no.4
Integration of two degree-of-freedom magnetostrictive actuation and piezoresistive detection: application to a tow-dimensional optical scannerTarik Bourouina; Eric Lebrasseur; Gilbert Reyne; Alexis Debray; Hiroyuki Fujita; Alfred Ludwig; Eckhard Quandt; Hideo Muro; Takahiko Oki; Akira Asaoka20022002, vol.11, no.4
12



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024