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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
Control Mechanism of an Organic Self-Regulating Microfluidic SystemSanghoon Lee; David T. Eddington; Youngmin Kim; Wooseung Kim; David J. Beebe20032003, vol.12, no.6
Etch Rates for Micromachining Processing-Part IIKirt R. Williams; Kishan Gupta; Matthew Wasilik20032003, vol.12, no.6
Silicon Micromachined Hollow Microneedles for Transdermal Liquid TransportHan J. G. E. Gardeniers; Regina Luttge; Erwin J. W. Berenschot; Meint J. de Boer; Shuki Y. Yeshurun; Meir Hefetz; Ronny van't Oever; Albert van den Berg20032003, vol.12, no.6
Thermocapillary Actuation of Droplets on Chemically Patterned Surfaces by Programmable Microheater ArraysAnton A. Darhuber; Joseph P. Valentino; Sandra M. Troian; Sigurd Wagner20032003, vol.12, no.6
Planar CMOS Compatible Process for the Fabrication of Buried Microchannels in Silicon, Using Porous-Silicon TechnologyGrigoris Kaltsas; Dimitris Nickos Pagonis; Androula G. Nassiopoulou20032003, vol.12, no.6
High-Voltage Constraints for Vacuum Packaged MicrostructuresChester G. Wilson; Yogesh B. Gianchandani; Amy E. Wendt20032003, vol.12, no.6
Electrolyte-Based On-Demand and Disposable MicrobatteryKi Bang Lee; Liwei Lin20032003, vol.12, no.6
Deformation of Blanketed and Patterned Bilayer Thin-Film Microstructures During Post-Release and Cyclic Thermal LoadingYanhang Zhang; Martin L. Dunn20032003, vol.12, no.6
Precision Passive Mechanical Alignment of WafersAlexander H. Slocum; Alexis C. Weber20032003, vol.12, no.6
Micro-Raman Measurement of Bending Stress in Micromachined Silicon FlexuresV. T. Srikar; Anna K. Swan; M. Selim Unlu; Bennett B. Goldberg; S. Mark Spearing20032003, vol.12, no.6
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