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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
Force-Controllable, Optically Driven Micromachines Fabricated by Single-Step Two-Photon MicrostereolithographyShoji Maruo; Koji Ikuta; Hayato Korogi20032003, vol.12, no.5
Optical Detection of the Coriolis Force on a Silicon Micromachined GyroscopeValerio Annovazzi-Lodi; Sabina Merlo; Michele Norgia; Guido Spinola; Benedetto Vigna; Sarah Zerbini20032003, vol.12, no.5
Integrated Magnetic Sensing of Electrostatically Actuated Thin-Film MicrobridgesJoao Gaspar; Haohua Li; Paulo Peixeiro Freitas; Virginia Chu; Joao Pedro Conde20032003, vol.12, no.5
Air Damping in Laterally Oscillating Microresenators: A Numerical and Experimental StudyWenjing Ye; Xin Wang; Werner Hemmert; Dennis Freeman; Jacob White20032003, vol.12, no.5
Fluid Damping in Resonant Flexural Plate Wave DeviceMarc S. Weinberg; Christopher E. Dube; Anthony Petrovich; Angela M. Zapata20032003, vol.12, no.5
Electrostatic Charge and Field Sensors Based on Micromechanical ResonatorsPatrick S. Riehl; Karen L. Scott; Richard S. Muller; Roger T. Howe; John A. Yasaitis20032003, vol.12, no.5
A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture ArraysMichel M. Maharbiz; William J. Holtz; Sahar Sharifzadeh; Jay D. Keasling; Roger T. Howe20032003, vol.12, no.5
A Microfabricated Suspended-Tube Chemical Reactor for Thermally Efficient Fuel ProcessingLeonel R. Arana; Samuel B. Schaevitz; Aleksander J. Franz; Martin A. Schmidt; Klavs F. Jensen20032003, vol.12, no.5
A Hydrogel-Actuated Environmentally Sensitive Microvalve for Active Flow ControlAntonio Baldi; Yuandong Gu; Paul E. Loftness; Ronald A. Siegel; Babak Ziaie20032003, vol.12, no.5
Microfabrication of Palladium-Silver Alloy Membranes for Hydrogen SeparationHien Duy Tong; J. W. Ervin Berenschot; Meint J. De Boer; J. G. E. (Han) Gardeniers; Henk Wensink; Henri V. Jansen; Wietze Nijdam; Miko C. Elwenspoek; F. C. (Frank) Gielens; Gees J. M. van Rijn20032003, vol.12, no.5
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