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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
Materials selection in micromechanical design: an application of the Ashby approachV. T. Srikar; S. Mark Spearing20032003, vol.12, no.1
Self-balanced navigation-grade capacitive microaccelerometers using branched finger electrodes and their performance for varying sense voltage and pressureKi-Ho Han; Young-Ho Cho20032003, vol.12, no.1
A pendulous oscillating gyroscopic accelerometer fabricated using deep-reactive ion etchingTodd J. Kaiser; Mark G. Allen20032003, vol.12, no.1
Design and microfabrication of a flexible oral electrotactile displayHui Tang; David J. Beebe20032003, vol.12, no.1
A micromachined impact microactuator driven by electrostatic forceMakoto Mita; Makoto Arai; Shouichi Tensaka; Dai Kobayashi; Hiroyuki Fujita20032003, vol.12, no.1
Microforming of three-dimensional microstructures from thin-film metallic glassHee-Won Jeong; Seiichi Hata; Akira Shimokohbe20032003, vol.12, no.1
Die-level characterization of silicon-nitride membrane/silicon structures using resonant ultrasonic spectroscopyHang Guo; Amit Lal20032003, vol.12, no.1
Development of an end-point detector for parylene deposition processWongso Sutomo; Xuefeng Wang; David Bullen; Sarah K. Braden; Chang Liu20032003, vol.12, no.1
Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuitsSung Kwon Cho; Hyejin Moon; Chang-Jin Kim20032003, vol.12, no.1
A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systemsDavid C. Roberts; Hanqing Li; J. Lodewyk Steyn; Onnik Yaglioglu; S. Mark Spearing; Martin A. Schmidt; Nesbitt W. Hagood20032003, vol.12, no.1
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