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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2011, vol.20, no.1 2011, vol.20, no.2 2011, vol.20, no.3 2011, vol.20, no.4 2011, vol.20, no.5 2011, vol.20, no.6

题名作者出版年年卷期
Modeling and Characterization of CMOS-Fabricated Capacitive Micromachined Ultrasound TransducersChristopher B. Doody; Xiaoyang Cheng; Collin A. Rich; David F. Lemmerhirt; Robert D. White20112011, vol.20, no.1
Development of a CMOS-Based Capacitive Tactile Sensor With Adjustable Sensing Range and Sensitivity Using Polymer Fill-InYu-Chia Liu; Chih-Ming Sun; Li-Yuan Lin; Ming-Han Tsai; Weileun Fang20112011, vol.20, no.1
Highly Integrable Flow Regulator With Positive GainFrancisco Perdigones; Antonio Luque; Alfonso M. Ganan-Calvo; Jose M. Quero20112011, vol.20, no.1
Fast Positioning and Impact Minimizing of MEMS Devices by Suppression of Motion-Induced Vibration by Command-Shaping MethodKuang-Shun Ou; Kuo-Shen Chen; Tian-Shiang Yang; Sen-Yung Lee20112011, vol.20, no.1
Multimodule Micro Transportation System Based on Electrostatic Comb-Drive Actuator and Ratchet MechanismDzung Viet Dao; Phuc Hong Pham; Susumu Sugiyama20112011, vol.20, no.1
Electromechanical Sensing of Charge Retention on Floating ElectrodesDavid Elata; Vitaly Leus; J. Provine; Arnon Hirshberg; Roger T. Howe20112011, vol.20, no.1
Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam SteeringSertan Kutal Gokce; Sven Holmstrom; Cyrille Hibert; Selim Olcer; David Bowman; Hakan Urey20112011, vol.20, no.1
Manipulating Vibration Energy Confinement in Electrically Coupled Microelectromechanical Resonator ArraysPradyumna Thiruvenkatanathan; Jim Woodhouse; Jize Yan; Ashwin A. Seshia20112011, vol.20, no.1
Modeling of Micromachined Beams Subject to Nonlinear Restoring or Damping ForcesJerome Juillard; Gregory Arndt; Eric Colinet20112011, vol.20, no.1
Annealing Temperature-Dependent Interfacial Behavior of Sequentially Plasma-Activated Silicon Bonded WafersMatiar M. R. Howlader; Fangfang Zhang; Moon J. Kim20112011, vol.20, no.1
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