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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2007, vol.16, no.1 2007, vol.16, no.2 2007, vol.16, no.3 2007, vol.16, no.4 2007, vol.16, no.5 2007, vol.16, no.6

题名作者出版年年卷期
Mechanically Controlled Quantum Contact With On-Chip MEMS ActuatorMurat Gel; Tadashi Ishida; Tetsuo Akasaka; Akinori Umeno; Koji Araki; Kaz Hirakawa; Hiroyuki Fujita20072007, vol.16, no.1
Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic FieldFelix Beyeler; Adrian Neild; Stefano Oberti; Dominik J. Bell; Yu Sun; Jurg Dual; Bradley J. Nelson20072007, vol.16, no.1
A Discrete Positioning Microactuator: Linearity Modeling and VOA ApplicationMan Geun Kim; Jong-Hyun Lee20072007, vol.16, no.1
Silicone Oil Contamination and Electrical Contact Resistance Degradation of Low-Force Gold ContactsDaniel J. Dickrell, III; Michael T. Dugger20072007, vol.16, no.1
An Integrated Floating-Electrode Electric MicrogeneratorWei Ma; Ruiqing Zhu; Libor Rufer; Yitshak Zohar; Man Wong20072007, vol.16, no.1
Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel TestZayd C. Leseman; Steven P. Carlson; Thomas J. Mackin20072007, vol.16, no.1
Theoretical Analysis of Strong-Axis Bending Mode Vibrations for Resonant Microcantilever (Bio)Chemical Sensors in Gas or Liquid PhaseIsabelle Dufour; Stephen M. Heinrich; Fabien Josse20072007, vol.16, no.1
A Thermally Responsive PDMS Composite and Its Microfluidic ApplicationsBjorn Samel; Patrick Griss; Goran Stemme20072007, vol.16, no.1
Two-Dimensional Analysis of Electrokinetically Driven Out-of-Plane Vortices in a MicroChannel Liquid Flow Using Patterned Surface ChargeYi-Kuen Lee; Lap Man Lee; Winky Lap Wing Hau; Yitshak Zohar20072007, vol.16, no.1
Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS ApplicationsCarrie W. Low; Tsu-Jae King Liu; Roger T. Howe20072007, vol.16, no.1
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