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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2007, vol.16, no.1 2007, vol.16, no.2 2007, vol.16, no.3 2007, vol.16, no.4 2007, vol.16, no.5 2007, vol.16, no.6

题名作者出版年年卷期
Strength Distributions in Polycrystalline Silicon MEMSBrad L. Boyce; J. Mark Grazier; Thomas E. Buchheit; Michael J. Shaw20072007, vol.16, no.2
Mechanical Characteristics of FIB Deposited Carbon Nanowires Using an Electrostatic Actuated Nano Tensile Testing DeviceMario Kiuchi; Shinji Matsui; Yoshitada Isono20072007, vol.16, no.2
Process Temperature-Dependent Mechanical Properties of Polysilicon Measured Using a Novel Tensile Test StructureShoji Kamiya; Jan H. Kuypers; Achim Trautmann; Patrick Ruther; Oliver Paul20072007, vol.16, no.2
Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope CantileversKeunhan Park; Jungchul Lee; Zhuomin M. Zhang; William P. King20072007, vol.16, no.2
Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow RegulationPo-Jui Chen; Damien C. Rodger; Ellis M. Meng; Mark S. Humayun; Yu-Chong Tai20072007, vol.16, no.2
Glass Blowing on a Wafer LevelE. Jesper Eklund; Andrei M. Shkel20072007, vol.16, no.2
Thermoplastic Forming of Bulk Metallic Glass - A Technology for MEMS and Micro structure FabricationJan Schroers; Quoc Pham; Amish Desai20072007, vol.16, no.2
Materials Selection and Design of Microelectrothermal Bimaterial ActuatorsSrinivasan Prasanna; S. Mark Spearing20072007, vol.16, no.2
Simple Fabrication Process for Self-Aligned, High-Performance Microscanners - Demonstrated Use to Generate a 2-D Ablation PatternHyuck Choo; David Garmire; James Demmel; Richard S. Muller20072007, vol.16, no.2
A Real Pivot Structure for MEMS Tunable LasersX. M. Zhang; A. Q. Liu; C. Lu; D. Y. Tang20072007, vol.16, no.2
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