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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2006, vol.15, no.1
2006, vol.15, no.2
2006, vol.15, no.3
2006, vol.15, no.4
2006, vol.15, no.5
2006, vol.15, no.6
题名
作者
出版年
年卷期
A Systematic Approach to Process Selection in MEMS
David J. Quinn; S. Mark Spearing; Mike F. Ashby; Norman A. Fleck
2006
2006, vol.15, no.5
Annealing Effects on Mechanical and Transport Properties of Ni and Ni-Alloy Electrodeposits
Theodorian Borca-Tasciuc; Diana-Andra Borca-Tasciuc; Samuel Graham; Steven H. Goods; James J. Kelly; Nancy Y. C. Yang
2006
2006, vol.15, no.5
Effects of Fabrication Process Parameters on the Properties of Cyclic Olefin Copolymer Microfluidic Devices
Carl K. Fredrickson; Zheng Xia; Champak Das; Ryan Ferguson; Fernando T. Tavares; Z. Hugh Fan
2006
2006, vol.15, no.5
A High-Performance MEMS Capacitive Strain Sensing System
Michael Suster; Jun Guo; Nattapon Chaimanonart; Wen H. Ko; Darrin J. Young
2006
2006, vol.15, no.5
Direct Numerical Simulation of Single-Molecule DNA by Cable Dynamics
Qiang Zhu; Jun Zeng; Michael S. Triantafyllou; Dick K. P. Yue
2006
2006, vol.15, no.5
A Self-Breathing Proton-Exchange-Membrane Fuel-Cell Pack With Optimal Design and Microfabrication
Cong Chen; Xinxin Li; Tao Wang; Xigui Zhang; Jufeng Li; Peitao Dong; Dan Zheng; Baojia Xia
2006
2006, vol.15, no.5
Resonant Magnetic Field Sensor With Frequency Output
Robert Sunier; Tobias Vancura; Yue Li; Kay-Uwe Kirstein; Henry Baltes; Oliver Brand
2006
2006, vol.15, no.5
Benchtop Polymer MEMS
Remi Delille; Mario G. Urdaneta; Samuel J. Moseley; Elisabeth Smela
2006
2006, vol.15, no.5
Multidirectional UV Lithography for Complex 3-D MEMS Structures
Yong-Kyu Yoon; Jung-Hwan Park; Mark G. Allen
2006
2006, vol.15, no.5
Thermomigration-Based Junction Isolation of Bulk Silicon MEMS Devices
Charles C. Chung; Mark G. Allen
2006
2006, vol.15, no.5
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