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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2010, vol.19, no.1 2010, vol.19, no.2 2010, vol.19, no.3 2010, vol.19, no.4 2010, vol.19, no.5 2010, vol.19, no.6

题名作者出版年年卷期
Experimental Validation of Mixed Electromechanical and Electromagnetic Modeling of RF-MEMS Devices Within a Standard IC Simulation EnvironmentJacopo Iannacci; Roberto Gaddi; Antonio Gnudi20102010, vol.19, no.3
Micromechanical IBARs: Modeling and Process CompensationGavin K. Ho; John Kangchun Perng; Farrokh Ayazi20102010, vol.19, no.3
Wafer-Level Transfer Technologies for PZT-Based RF MEMS SwitchesRoland Guerre; Ute Drechsler; Debabrata Bhattacharyya; Pekka Rantakari; Richard Stutz; Robert V. Wright; Zlatoljub D. Milosavljevic; Tauno Vaha-Heikkila; Paul B. Kirby; Michel Despont20102010, vol.19, no.3
Development of a High-Performance Microelectrostatic Repulsive-Force Rotation ActuatorSiyuan He; R. Ben Mrad; J. S. Chang20102010, vol.19, no.3
Micromechanical IBARs: Tunable High-Q Resonators for Temperature-Compensated Reference OscillatorsGavin K. Ho; Krishnakumar Sundaresan; Siavash Pourkamali; Farrokh Ayazi20102010, vol.19, no.3
High-Capacitance-Ratio Warped-Beam Capacitive MEMS Switch DesignsReena Al-Dahleh; Raafat R. Mansour20102010, vol.19, no.3
Chip-Scale Quadrupole Mass Filters for Portable Mass SpectrometryKerry Cheung; Luis Fernando Velasquez-Garcia; Akintunde Ibitayo Akinwande20102010, vol.19, no.3
Design, Fabrication, and Application of Bio-Implantable Acoustic Power TransmissionPo-Jen Shih; Wen-Pin Shih20102010, vol.19, no.3
Novel Capacitive Pressure SensorEzzat G. Bakhoum; Marvin H. M. Cheng20102010, vol.19, no.3
Thermally Actuated Omnidirectional Walking MicrorobotE. Yegan Erdem; Yu-Ming Chen; Matthew Mohebbi; John W. Suh; Gregory T. A. Kovacs; Robert B. Darling; Karl F. Bohringer20102010, vol.19, no.3
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