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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2005, vol.14, no.1 2005, vol.14, no.2 2005, vol.14, no.3 2005, vol.14, no.4 2005, vol.14, no.5 2005, vol.14, no.6

题名作者出版年年卷期
Torque Multiplication and Stable Range Tradeoff in Parallel Plate Angular Electrostatic Actuators With Fixed DC BiasAjay Pareek; Mehmet R. Dokmeci; Shivalik Bakshi; Carlos H. Mastrangelo20052005, vol.14, no.6
Fully Compliant Tensural Bistable Micromechanisms (FTBM)Daniel L. Wilcox; Larry L. Howell20052005, vol.14, no.6
Influence of Bending-Extension Coupling on the Modal Frequencies of Nonsymmetrically Laminated MEMS MicrocantileversRonald F. Gibson; Zhengyu Liu; Niranjan Srinivasan20052005, vol.14, no.6
Third-Order Intermodulation in a Micromechanical Thermal MixerRobert B. Reichenbach; Maxim Zalalutdinov; Keith L. Aubin; Richard Rand; Brian H. Houston; Jeevak M. Parpia; Harold G. Craighead20052005, vol.14, no.6
A Methodology and Model for the Pull-In Parameters of Magnetostatic ActuatorsYael Nemirovsky; I. Zelniker; Ofir Degani; Gilaad Sarusi20052005, vol.14, no.6
Multistep Sequential Batch Assembly of Three-Dimensional Ferromagnetic Microstructures With Elastic HingesEiji Iwase; Isao Shimoyama20052005, vol.14, no.6
A Novel Capacitive Pressure Sensor Based on Sandwich StructuresMin-Xin Zhou; Qing-An Huang; Ming Qin; Wei Zhou20052005, vol.14, no.6
Deep-Reactive Ion-Etched Compliant Starting Zone Electrostatic Zipping ActuatorsJian Li; Michael P. Brenner; Thomas Christen; Markku Sami Kotilainen; Jeffrey H. Lang; Alexander H. Slocum20052005, vol.14, no.6
High-Q UHF Micromechanical Radial-Contour Mode Disk ResonatorsJohn R. Clark; Wan-Thai Hsu; Mohamed A. Abdelmoneum; Clark T.-C. Nguyen20052005, vol.14, no.6
Design and Process Considerations for Fabricating RF MEMS Switches on Printed Circuit BoardsHung-Pin Chang; Jiangyuan Qian; Bedri Artug Cetiner; Franco De Flaviis; Mark Bachman; G. P. Li20052005, vol.14, no.6
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