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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2005, vol.14, no.1 2005, vol.14, no.2 2005, vol.14, no.3 2005, vol.14, no.4 2005, vol.14, no.5 2005, vol.14, no.6

题名作者出版年年卷期
Static Friction in Polysilicon Surface MicromachinesAri Lumbantobing; Kyriakos Komvopoulos20052005, vol.14, no.4
Mechanical Properties of Epitaxial 3C Silicon Carbide Thin FilmsKamili M. Jackson; Jeremy Dunning; Christian A. Zorman; Mehran Mehregany; William N. Sharpe, Jr.20052005, vol.14, no.4
A Micromachined Refreshable Braille CellJun Su Lee; Stepan Lucyszyn20052005, vol.14, no.4
Design and Fabrication of a Novel Bimorph Microoptomechanical SensorSi-Hyung Lim; Jongeun Choi; Roberto Horowitz; Arunava Majumdar20052005, vol.14, no.4
A Micromachined Kelvin Probe With Integrated Actuator for Microfluidic and Solid-State ApplicationsLarry L. Chu; Kenichi Takahata; Ponnambalam Ravi Selvaganapathy; Yogesh B. Gianchandani; J. Leon Shohet20052005, vol.14, no.4
Micromachined Acoustic Resonant Mass SensorHao Zhang; Eun Sok Kim20052005, vol.14, no.4
A Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope on an Insulating SubstrateSaid Emre Alper; Tayfun Akin20052005, vol.14, no.4
Bidirectional Electrostatic Actuator Operated With Charge ControlToshiyuki Sugimoto; Kenichiro Nonaka; Mark N. Horenstein20052005, vol.14, no.4
Robot Leg Motion in a Planarized-SOI, Two-Layer Poly-Si ProcessSeth Hollar; Anita Flynn; Sarah Bergbreiter; K. S. J. Pister20052005, vol.14, no.4
On-Chip Vacuum Generated by a Micromachined Knudsen PumpShamus McNamara; Yogesh B. Gianchandani20052005, vol.14, no.4
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