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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2005, vol.14, no.1 2005, vol.14, no.2 2005, vol.14, no.3 2005, vol.14, no.4 2005, vol.14, no.5 2005, vol.14, no.6

题名作者出版年年卷期
Three-Dimensional Thin-Film Li-Ion Microbatteries for Autonomous MEMSMenachem Nathan; Diana Golodnitsky; Vladimir Yufit; Ela Strauss; Tania Ripenbein; Inna Shechtman; Svetlana Menkin; Emanuel Peled20052005, vol.14, no.5
Polymer-Core Conductor Approaches for RF MEMSYong-Kyu Yoon; Jin-Woo Park; Mark G. Allen20052005, vol.14, no.5
Polymer-Based Wide-Bandwidth and High-Sensitivity Micromachined Electron Tunneling Accelerometers Using Hot EmbossingTianhong Cui; Jing Wang20052005, vol.14, no.5
Fracture Strength of Silicon Carbide MicrospecimensWilliam N. Sharpe, Jr.; Osama Jadaan; Glenn M. Beheim; George D. Quinn; Noel N. Nemeth20052005, vol.14, no.5
Anodic Oxidation During MEMS Processing of Silicon and Polysilicon: Native Oxides Can Be Thicker Than You ThinkHarold Kahn; Chris Deeb; Loannis Chasiotis; Arthur H. Heuer20052005, vol.14, no.5
Microheated Substrates for Patterning Cells and Controlling DevelopmentWenmiao Shu; W. Neil Everett; Qing X. Zhang; Minghui H. Liu; Alastair Trigg; Yuexia Ma; S. Mark Spearing; Shu Wang; Hung-Jue Sue; Peter M. Moran20052005, vol.14, no.5
Effect of Nanoscale Heating on Electrical Transport in RF MEMS Switch ContactsBrian D. Jensen; Linda L.-W. Chow; Kuangwei Huang; Kazuhiro Saitou; John L. Volakis; Katsuo Kurabayashi20052005, vol.14, no.5
Adhesion Characteristics of MEMS in MicrofluidicElizabeth E. Parker; W. Robert Ashurst; Carlo Carraro; Roya Maboudian20052005, vol.14, no.5
MEMS Lubricants Based on Bound and Mobile Phases of Hydrocarbon Compounds: Film Deposition and Performance EvaluationKalathil C. Eapen; Steven T. Patton; Steven A. Smallwood; Benjamin S. Phillips; Jeffrey S. Zabinski20052005, vol.14, no.5
Method for Determining a Dynamical State-Space Model for Control of Thermal MEMS DevicesBruno Borovic; Frank L. Lewis; Dereje Agonafer; Edward S. Kolesar; Mohammad Masum Hossain; Dan O. Popa20052005, vol.14, no.5
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