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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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2005, vol.14, no.1 2005, vol.14, no.2 2005, vol.14, no.3 2005, vol.14, no.4 2005, vol.14, no.5 2005, vol.14, no.6

题名作者出版年年卷期
Microfluidic Electrodischarge Devices With Integrated Dispersion Optics for Spectral Analysis of Water ImpuritiesLong Que; Chester G. Wilson; Yogesh B. Gianchandani20052005, vol.14, no.2
Piezoelectric ally Actuated Dome-Shaped Diaphragm MicropumpGuo-Hua Feng; Eun Sok Kim20052005, vol.14, no.2
A Seat Microvalve Nozzle for Optimal Gas-Flow Capacity at Large-Controlled PressureWouter van der Wijngaart; Anders Thorsen; Goran Stemme20052005, vol.14, no.2
Flow Control in Microdevices Using Thermally Responsive Triblock CopolymersBoris Stoeber; Zhihao Yang; Dorian Liepmann; Susan J. Muller20052005, vol.14, no.2
High-Reliability, High-Performance RF Micromachined Switch Using Liquid MetalYou Kondoh; Tsutomu Takenaka; Tetsuya Hidaka; Go Tejima; Yasuhisa Kaneko; Mitsuchika Saitoh20052005, vol.14, no.2
Electrostatic Correction of Structural Imperfections Present in a Microring GyroscopeBarry J. Gallacher; John Hedley; James S. Burdess; Alun James Harris; Alexandria Rickard; David O. King20052005, vol.14, no.2
A Monolithic Three-Axis Micro-g Micromachined Silicon Capacitive AccelerometerJunseok Chae; Haluk Kulah; Khalil Najafi20052005, vol.14, no.2
A MEMS Conical Spring Actuator ArrayTakashi Fukushige; Seiichi Hata; Akira Shimokohbe20052005, vol.14, no.2
Hybrid-Mounted Micromachined Aluminum Hotwires for Wall Shear-Stress MeasurementsSjoerd Haasl; Dirk Mucha; Valery Chernoray; Thorbjorn Ebefors; Peter Enoksson; Lennart Lofdahl; Goran Stemme20052005, vol.14, no.2
Design and Nonlinear Servo Control of MEMS Mirrors and Their Performance in a Large Port-Count Optical SwitchPatrick B. Chu; Igal Brener; Chuan Pu; Shi-Sheng Lee; Jerry I. Dadap; Sangtae Park; Keren Bergman; Nicolas H. Bonadeo; Tai Chau; Ming Chou; Robert A. Doran; Rick Gibson; Roey Harel; John J. Johnson; C. Daniel Lee; David R. Peale; Bo Tang20052005, vol.14, no.2
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