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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2005
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2005, vol.14, no.1
2005, vol.14, no.2
2005, vol.14, no.3
2005, vol.14, no.4
2005, vol.14, no.5
2005, vol.14, no.6
题名
作者
出版年
年卷期
Static Friction in Polysilicon Surface Micromachines
Ari Lumbantobing; Kyriakos Komvopoulos
2005
2005, vol.14, no.4
Mechanical Properties of Epitaxial 3C Silicon Carbide Thin Films
Kamili M. Jackson; Jeremy Dunning; Christian A. Zorman; Mehran Mehregany; William N. Sharpe, Jr.
2005
2005, vol.14, no.4
A Micromachined Refreshable Braille Cell
Jun Su Lee; Stepan Lucyszyn
2005
2005, vol.14, no.4
Design and Fabrication of a Novel Bimorph Microoptomechanical Sensor
Si-Hyung Lim; Jongeun Choi; Roberto Horowitz; Arunava Majumdar
2005
2005, vol.14, no.4
A Micromachined Kelvin Probe With Integrated Actuator for Microfluidic and Solid-State Applications
Larry L. Chu; Kenichi Takahata; Ponnambalam Ravi Selvaganapathy; Yogesh B. Gianchandani; J. Leon Shohet
2005
2005, vol.14, no.4
Micromachined Acoustic Resonant Mass Sensor
Hao Zhang; Eun Sok Kim
2005
2005, vol.14, no.4
A Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope on an Insulating Substrate
Said Emre Alper; Tayfun Akin
2005
2005, vol.14, no.4
Bidirectional Electrostatic Actuator Operated With Charge Control
Toshiyuki Sugimoto; Kenichiro Nonaka; Mark N. Horenstein
2005
2005, vol.14, no.4
Robot Leg Motion in a Planarized-SOI, Two-Layer Poly-Si Process
Seth Hollar; Anita Flynn; Sarah Bergbreiter; K. S. J. Pister
2005
2005, vol.14, no.4
On-Chip Vacuum Generated by a Micromachined Knudsen Pump
Shamus McNamara; Yogesh B. Gianchandani
2005
2005, vol.14, no.4
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