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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1999, vol.8, no.1 1999, vol.8, no.2 1999, vol.8, no.3 1999, vol.8, no.4

题名作者出版年年卷期
A multilink active catheter with polyimide-based integrated CMOS interface circuitsKi-Tae Park; Masayoshi Esashi19991999, vol.8, no.4
A new tunneling-based sensor for inertial rotation rate measurementsR. L. Kubena; D. J. Vickers-Kirby; R. J. Joyce; Frederick P. Stratton19991999, vol.8, no.4
A numerical simulation on a pneumatic air table realized by micro-EDMT. Hirata; O. T. Guenat; T. Akashi; M. -A. Gretillat; N. F. de Rooij19991999, vol.8, no.4
A simulation program for the sensitivity and linearity of piezoresistive pressure sensorsLiwei Lin; Huey-Chi Chu; Yen-Wen Lu19991999, vol.8, no.4
A system for automatic electrical and optical characterization of microelectromechanical devicesDaniel J. Burns; Herbert F. Helbig19991999, vol.8, no.4
An inertial sensor technology using DRIE and wafer bonding with interconnecting capabilityKei Ishihara; Chi-Fan Yung; Arturo A. Ayon; Martin A. Schmidt19991999, vol.8, no.4
CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objectsJohn W. Suh; R. Bruce Darling; Karl-F. Bohringer; Bruce R. Donald; Henry Baltes; Gregory T. A. Kovacs19991999, vol.8, no.4
Design, fabrication, and testing of micromachined silicon rubber membrane valvesXing Yang; Charles Grosjean; Yu-Chong Tai19991999, vol.8, no.4
Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon platesElisabeth Smela; Matthias Kallenbach; Jens Holdenried19991999, vol.8, no.4
Extending the travel range of analog-tuned electrostatic actuatorsElmer S. Hung; Stephen D. Senturia19991999, vol.8, no.4
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