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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1999, vol.8, no.1 1999, vol.8, no.2 1999, vol.8, no.3 1999, vol.8, no.4

题名作者出版年年卷期
A microstructure for in situ determination of residual strainChi Shiang Pan; Wensyang Hsu19991999, vol.8, no.2
Characterization of contact electromechanics through capacitance-voltage measurements and simulationsEdward K. Chan; Krishna Garikipati; Robert W. Dutton19991999, vol.8, no.2
Measurement of the thermal conductivity anisotropy in polyimide filmsKatsuo Kurabayashi; Mehdi Asheghi; Mzxat Touzelbaev; Kenneth E. Goodson19991999, vol.8, no.2
MgO sacrificial layer for micromachining uncooled Y-Ba-Cu-O IR microbolometers on Si{sub}3N{sub}4 bridgesJohn E. Gray; Zeynep Celik-Butler; Donald P. Butler19991999, vol.8, no.2
Microfabrication of high-temperature silicon devices using wafer bonding and deep reactive ion etchingAmit Mehra; Arturo A. Ayon; Ian A. Waitz; Martin A. Schmidt19991999, vol.8, no.2
Micromachined low-loss microwave switchesZ. Jamie Yao; Shea Chen; Susan Eshelman; David Denniston; Chuck Goldsmith19991999, vol.8, no.2
Photo-electroforming: 3-D geometry and materials flexibility in a MEMS fabrication processChe-Chih Tsao; Emanuel Sachs19991999, vol.8, no.2
Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimizationChang Liu; Yu-Chong Tai19991999, vol.8, no.2
The fabrication of nonplanar spin-on glass microstructuresRobin H. Liu; Michael J. Vasile; David J. Beebe19991999, vol.8, no.2
Thick glass film technology for polysilicon surface micromachiningA. Azzam Yasseen; James D. Cawley; Mehran Mehregany19991999, vol.8, no.2



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