长垣产业园区科技文献服务平台

期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

1999, vol.8, no.1 1999, vol.8, no.2 1999, vol.8, no.3 1999, vol.8, no.4

题名作者出版年年卷期
A merged process for thick single-crystal Si resonators and BiCMOS circuitryJ. W. Weigold; A. -C. Wong; C. T. -C. Nguyen; S. W. Pang19991999, vol.8, no.3
A multilevel Newton method for mixed-energy domain simulation of MEMSN. R. Aluru; Jacob White19991999, vol.8, no.3
A thermal inkjet printhead with a monolithically fabricated Nozzle plate and self-aligned ink feed holeJae-Duk Lee; Jun-Bo Yoon; Jae-Kwan Kim; Hoon-Ju Chung; Choon-Sup Lee; Hi-Deok Lee; Ho-Jun Lee; Choon19991999, vol.8, no.3
Analytical modeling of electrostatic membrane actuator for micro pumpsM. T. A. Saif; B. Erdem Alaca; Huseyin Sehitoglu19991999, vol.8, no.3
CARAMEL: contamination and reliability analysis of microelectromechanical layoutAbhijeet Kolpekwar; Tao Jiang; R. D. (Shawn) Blanton19991999, vol.8, no.3
Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technologyHelene Debeda; Thilo V. Freyhold; Jurgen Mohr; Ulrike Wallrabe; Jorg Wengelink19991999, vol.8, no.3
Experimental evaluation of MEMS strain sensors embedded in compositesCharles Hautamaki; Shayne Zurn; Susan C. Mantell; Dennis L. Polla19991999, vol.8, no.3
Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine enginesN. Rajan; M. Mehregany; Christian A. Zorman; S. Stefanescu; T. P. Kicher19991999, vol.8, no.3
Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runsElmer S. Hung; Stephen D. Senturia19991999, vol.8, no.3
Improved design of a silicon micromachined gyroscope with piezoresistive detection and electromagnetic excitationFlorence Gretillat; Marc-Alexis Gretillat; Nicolaas F. de Rooij19991999, vol.8, no.3
12



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  机械工业信息研究院 2018-2024