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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2011, vol.20, no.1
2011, vol.20, no.2
2011, vol.20, no.3
2011, vol.20, no.4
2011, vol.20, no.5
2011, vol.20, no.6
题名
作者
出版年
年卷期
Silica-Encapsulated Nanoparticle Films as Surface Modifications for MEMS
Kendall M. Hurst; Naveed Ansari; Christopher B. Roberts; W. Robert Ashurst
2011
2011, vol.20, no.5
Quality Factor Enhancement of Lateral Microresonators in Liquid Media by Hydrophobic Coating
Deniz Eroglu; Haluk Kulah
2011
2011, vol.20, no.5
Gamma Irradiation Effects on Surface-Micromachined Polysilicon Resonators
Lei Wang; Jieying Tang; Qing-An Huang
2011
2011, vol.20, no.5
In Situ Tuning of Focused-Ion-Beam Defined Nanomechanical Resonators Using Joule Heating
Lasse V. Homann; Tim Booth; Anders Lei; Dirch Hjorth Petersen; Zachary J. Davis; Peter Boggild
2011
2011, vol.20, no.5
Postfabrication Electrical Trimming of Silicon Micromechanical Resonators via Joule Heating
Ashwin K. Samarao; Farrokh Ayazi
2011
2011, vol.20, no.5
Microbricks for Three-Dimensional Reconfigurable Modular Microsystems
Jonathan D. Hiller; Joseph Miller; Hod Lipson
2011
2011, vol.20, no.5
Impedance-Based Force Transduction Within Fluid-Filled Parylene Microstructures
Christian A. Gutierrez; Ellis Meng
2011
2011, vol.20, no.5
Development and Characterization of Multisite Three-Dimensional Microprobes for Deep Brain Stimulation and Recording
Arash A. Fomani; Raafat R. Mansour; Carlos M. Florez-Quenguan; Peter L. Carlen
2011
2011, vol.20, no.5
A Fully Passive Wireless Microsystem for Recording of Neuropotentials Using RF Backscattering Methods
Helen N. Schwerdt; Wencheng Xu; Sameer Shekhar; Abbas Abbaspour-Tamijani; Bruce C. Towe; Felix A. Miranda; Junseok Chae
2011
2011, vol.20, no.5
Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power
Huicong Liu; Cho Jui Tay; Chenggen Quan; Takeshi Kobayashi; Chengkuo Lee
2011
2011, vol.20, no.5
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