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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2011, vol.20, no.1
2011, vol.20, no.2
2011, vol.20, no.3
2011, vol.20, no.4
2011, vol.20, no.5
2011, vol.20, no.6
题名
作者
出版年
年卷期
Maskless Grayscale Lithography Using a Positive-Tone Photodefinable Polyimide for MEMS Applications
Joseph H. Lake; Scott D. Cambron; Kevin M. Walsh; Shamus McNamara
2011
2011, vol.20, no.6
Single-Crystal PMN-PT MEMS Deformable Mirrors
Hyunkyu Park; David A. Horsley
2011
2011, vol.20, no.6
Scanning and Tunable Micro-Optics for Endoscopic Optical Coherence Tomography
Khaled Aljasem; Luc Froehly; Andreas Seifert; Hans Zappe
2011
2011, vol.20, no.6
Electrostatic Accumulation and Release of DNA Using a Micromachined Lance
Quentin T. Aten; Brian D. Jensen; Sandra H. Burnett; Larry L. Howell
2011
2011, vol.20, no.6
CMOS-Based High-Density Silicon Microprobe Arrays for Electronic Depth Control in Intracortical Neural Recording
Karsten Seidl; Stanislav Herwik; Tom Torfs; Herc P. Neves; Oliver Paul; Patrick Ruther
2011
2011, vol.20, no.6
Integration of Bulk Nanoporous Elements in Microfluidic Devices With Application to Biomedical Diagnostics
Fabio Fachin; Grace Dongqing Chen; Mehmet Toner; Brian L. Wardle
2011
2011, vol.20, no.6
Monolithic Fabrication of EWOD Chips for Picoliter Droplets
Wyatt C. Nelson; Chang-Jin "CJ" Kim
2011
2011, vol.20, no.6
Effect of Deposition Gas Ratio, RF Power, and Substrate Temperature on the Charging/Discharging Processes in PECVD Silicon Nitride Films for Electrostatic NEMS/MEMS Reliability Using Atomic Force Microscopy
Usama Zaghloul; George J. Papaioannou; Bharat Bhushan; Haixia Wang; Fabio Coccetti; Patrick Pons; Robert Plana
2011
2011, vol.20, no.6
Force Rebalance Controller Synthesis for a Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications
Jian Cui; Zhongyang Guo; Qiancheng Zhao; Zhenchuan Yang; Yilong Hao; Guizhen Yan
2011
2011, vol.20, no.6
Q Control of an Atomic Force Microscope Microcantilever: A Sensorless Approach
Matthew W. Fairbairn; S. O. Reza Moheimani; Andrew J. Fleming
2011
2011, vol.20, no.6
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