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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2007, vol.16, no.1
2007, vol.16, no.2
2007, vol.16, no.3
2007, vol.16, no.4
2007, vol.16, no.5
2007, vol.16, no.6
题名
作者
出版年
年卷期
Strength Distributions in Polycrystalline Silicon MEMS
Brad L. Boyce; J. Mark Grazier; Thomas E. Buchheit; Michael J. Shaw
2007
2007, vol.16, no.2
Mechanical Characteristics of FIB Deposited Carbon Nanowires Using an Electrostatic Actuated Nano Tensile Testing Device
Mario Kiuchi; Shinji Matsui; Yoshitada Isono
2007
2007, vol.16, no.2
Process Temperature-Dependent Mechanical Properties of Polysilicon Measured Using a Novel Tensile Test Structure
Shoji Kamiya; Jan H. Kuypers; Achim Trautmann; Patrick Ruther; Oliver Paul
2007
2007, vol.16, no.2
Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers
Keunhan Park; Jungchul Lee; Zhuomin M. Zhang; William P. King
2007
2007, vol.16, no.2
Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation
Po-Jui Chen; Damien C. Rodger; Ellis M. Meng; Mark S. Humayun; Yu-Chong Tai
2007
2007, vol.16, no.2
Glass Blowing on a Wafer Level
E. Jesper Eklund; Andrei M. Shkel
2007
2007, vol.16, no.2
Thermoplastic Forming of Bulk Metallic Glass - A Technology for MEMS and Micro structure Fabrication
Jan Schroers; Quoc Pham; Amish Desai
2007
2007, vol.16, no.2
Materials Selection and Design of Microelectrothermal Bimaterial Actuators
Srinivasan Prasanna; S. Mark Spearing
2007
2007, vol.16, no.2
Simple Fabrication Process for Self-Aligned, High-Performance Microscanners - Demonstrated Use to Generate a 2-D Ablation Pattern
Hyuck Choo; David Garmire; James Demmel; Richard S. Muller
2007
2007, vol.16, no.2
A Real Pivot Structure for MEMS Tunable Lasers
X. M. Zhang; A. Q. Liu; C. Lu; D. Y. Tang
2007
2007, vol.16, no.2
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