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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2007, vol.16, no.1
2007, vol.16, no.2
2007, vol.16, no.3
2007, vol.16, no.4
2007, vol.16, no.5
2007, vol.16, no.6
题名
作者
出版年
年卷期
Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator
Murat Gel; Tadashi Ishida; Tetsuo Akasaka; Akinori Umeno; Koji Araki; Kaz Hirakawa; Hiroyuki Fujita
2007
2007, vol.16, no.1
Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field
Felix Beyeler; Adrian Neild; Stefano Oberti; Dominik J. Bell; Yu Sun; Jurg Dual; Bradley J. Nelson
2007
2007, vol.16, no.1
A Discrete Positioning Microactuator: Linearity Modeling and VOA Application
Man Geun Kim; Jong-Hyun Lee
2007
2007, vol.16, no.1
Silicone Oil Contamination and Electrical Contact Resistance Degradation of Low-Force Gold Contacts
Daniel J. Dickrell, III; Michael T. Dugger
2007
2007, vol.16, no.1
An Integrated Floating-Electrode Electric Microgenerator
Wei Ma; Ruiqing Zhu; Libor Rufer; Yitshak Zohar; Man Wong
2007
2007, vol.16, no.1
Experimental Measurements of the Strain Energy Release Rate for Stiction-Failed Microcantilevers Using a Single-Cantilever Beam Peel Test
Zayd C. Leseman; Steven P. Carlson; Thomas J. Mackin
2007
2007, vol.16, no.1
Theoretical Analysis of Strong-Axis Bending Mode Vibrations for Resonant Microcantilever (Bio)Chemical Sensors in Gas or Liquid Phase
Isabelle Dufour; Stephen M. Heinrich; Fabien Josse
2007
2007, vol.16, no.1
A Thermally Responsive PDMS Composite and Its Microfluidic Applications
Bjorn Samel; Patrick Griss; Goran Stemme
2007
2007, vol.16, no.1
Two-Dimensional Analysis of Electrokinetically Driven Out-of-Plane Vortices in a MicroChannel Liquid Flow Using Patterned Surface Charge
Yi-Kuen Lee; Lap Man Lee; Winky Lap Wing Hau; Yitshak Zohar
2007
2007, vol.16, no.1
Characterization of Polycrystalline Silicon-Germanium Film Deposition for Modularly Integrated MEMS Applications
Carrie W. Low; Tsu-Jae King Liu; Roger T. Howe
2007
2007, vol.16, no.1
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