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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2003, vol.12, no.1
2003, vol.12, no.2
2003, vol.12, no.3
2003, vol.12, no.4
2003, vol.12, no.5
2003, vol.12, no.6
题名
作者
出版年
年卷期
Force-Controllable, Optically Driven Micromachines Fabricated by Single-Step Two-Photon Microstereolithography
Shoji Maruo; Koji Ikuta; Hayato Korogi
2003
2003, vol.12, no.5
Optical Detection of the Coriolis Force on a Silicon Micromachined Gyroscope
Valerio Annovazzi-Lodi; Sabina Merlo; Michele Norgia; Guido Spinola; Benedetto Vigna; Sarah Zerbini
2003
2003, vol.12, no.5
Integrated Magnetic Sensing of Electrostatically Actuated Thin-Film Microbridges
Joao Gaspar; Haohua Li; Paulo Peixeiro Freitas; Virginia Chu; Joao Pedro Conde
2003
2003, vol.12, no.5
Air Damping in Laterally Oscillating Microresenators: A Numerical and Experimental Study
Wenjing Ye; Xin Wang; Werner Hemmert; Dennis Freeman; Jacob White
2003
2003, vol.12, no.5
Fluid Damping in Resonant Flexural Plate Wave Device
Marc S. Weinberg; Christopher E. Dube; Anthony Petrovich; Angela M. Zapata
2003
2003, vol.12, no.5
Electrostatic Charge and Field Sensors Based on Micromechanical Resonators
Patrick S. Riehl; Karen L. Scott; Richard S. Muller; Roger T. Howe; John A. Yasaitis
2003
2003, vol.12, no.5
A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays
Michel M. Maharbiz; William J. Holtz; Sahar Sharifzadeh; Jay D. Keasling; Roger T. Howe
2003
2003, vol.12, no.5
A Microfabricated Suspended-Tube Chemical Reactor for Thermally Efficient Fuel Processing
Leonel R. Arana; Samuel B. Schaevitz; Aleksander J. Franz; Martin A. Schmidt; Klavs F. Jensen
2003
2003, vol.12, no.5
A Hydrogel-Actuated Environmentally Sensitive Microvalve for Active Flow Control
Antonio Baldi; Yuandong Gu; Paul E. Loftness; Ronald A. Siegel; Babak Ziaie
2003
2003, vol.12, no.5
Microfabrication of Palladium-Silver Alloy Membranes for Hydrogen Separation
Hien Duy Tong; J. W. Ervin Berenschot; Meint J. De Boer; J. G. E. (Han) Gardeniers; Henk Wensink; Henri V. Jansen; Wietze Nijdam; Miko C. Elwenspoek; F. C. (Frank) Gielens; Gees J. M. van Rijn
2003
2003, vol.12, no.5
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