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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
Evaluation of elastic properties and temperature effects in Si thin films using an electrostatic microresonatorJeung-Hyun Jeong; Sung-Hoon Chung; Se-Ho Lee; Dongil Kwon20032003, vol.12, no.4
Electrothermal properties and modeling of polysilicon microthermal actuatorsAaron A. Geisberger; Niladri Sarkar; Matthew Ellis; George D. Skidmore20032003, vol.12, no.4
Front-end processor using BBD distributed delay-sum architecture for micromachined ultrasonic sensor arrayYaowu Mo; Tsunehisa Tanaka; Koji Inoue; Kaoru Yamashita; Yoshihiko Suzuki20032003, vol.12, no.4
Microfluidic integrated circuits for signal processing using analogous relationship between pneumatic microvalve and MOSFETHidekuni Takao; Makoto Ishida20032003, vol.12, no.4
High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gapsSiavash Pourkamali; Akinori Hashimura; Reza Abdolvand; Gavin K. Ho; Ahmet Erbil; Farrokh Ayazi20032003, vol.12, no.4
A high-sensitivity silicon accelerometer with a folded-electrode structureNavid Yazdi; Khalil Najafi; Arvind S. Salian20032003, vol.12, no.4
Silicon micro XY-stage with a large area shuttle and No-etching holes for SPM-based data storageChe-Heung Kim; Hee-Moon Jeong; Jong-Up Jeon; Yong-Kweon Kim20032003, vol.12, no.4
Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bondingFrank Niklaus; Sjoerd Haasl; Goran Stemme20032003, vol.12, no.4
Self-aligned vertical electrostatic combdrives for micromirror actuationUma Krishnamoorthy; Daesung Lee; Olav Solgaard20032003, vol.12, no.4
A CMOS-MEMS mirror with curled-hinge comb drivesHuikai Xie; Yingtian Pan; Gary K. Fedder20032003, vol.12, no.4
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