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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2003, vol.12, no.1
2003, vol.12, no.2
2003, vol.12, no.3
2003, vol.12, no.4
2003, vol.12, no.5
2003, vol.12, no.6
题名
作者
出版年
年卷期
Surface tension-powered self-assembly of microstructures - the state-of-the-art
Richard R. A. Syms; Eric M. Yeatman; Victor M. Bright; George M. Whitesides
2003
2003, vol.12, no.4
Microfabrication using one-step LPCVD porous polysilicon films
George M. Dougherty; Timothy D. Sands; Albert P. Pisano
2003
2003, vol.12, no.4
Thermokinetic actuation for batch assembly of microscale hinged structures
Ville Kaajakari; Amit Lal
2003
2003, vol.12, no.4
Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers
Li-Peng Wang; Richard A. Wolf; Yu Wang; Ken K. Deng; Lichun Zou; Robert J. Davis; Susan Trolier-McKinstry
2003
2003, vol.12, no.4
Vertical comb array microactuators
Arjun Selvakumar; Khalil Najafi
2003
2003, vol.12, no.4
A CMOS-MEMS mirror with curled-hinge comb drives
Huikai Xie; Yingtian Pan; Gary K. Fedder
2003
2003, vol.12, no.4
Self-aligned vertical electrostatic combdrives for micromirror actuation
Uma Krishnamoorthy; Daesung Lee; Olav Solgaard
2003
2003, vol.12, no.4
Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bonding
Frank Niklaus; Sjoerd Haasl; Goran Stemme
2003
2003, vol.12, no.4
Silicon micro XY-stage with a large area shuttle and No-etching holes for SPM-based data storage
Che-Heung Kim; Hee-Moon Jeong; Jong-Up Jeon; Yong-Kweon Kim
2003
2003, vol.12, no.4
A high-sensitivity silicon accelerometer with a folded-electrode structure
Navid Yazdi; Khalil Najafi; Arvind S. Salian
2003
2003, vol.12, no.4
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