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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2003, vol.12, no.1
2003, vol.12, no.2
2003, vol.12, no.3
2003, vol.12, no.4
2003, vol.12, no.5
2003, vol.12, no.6
题名
作者
出版年
年卷期
Guest editorial-how to avoid the reviewer's axe: one editor's view
Stephen D. Senturia
2003
2003, vol.12, no.3
Corner-cube retroreflectors based on structure-assisted assembly for free-space optical communication
Lixia Zhou; Joseph M. Kahn; Kristofer S. J. Pister
2003
2003, vol.12, no.3
A MEMS electromagnetic optical scanner for a commercial confocal laser scanning microscope
Hiroshi Miyajima; Nobuyoshi Asaoka; Toshihiko Isokawa; Masanori Ogata; Yukihiro Aoki; Masaharu Imai; Osamu Fujimori; Masahiro Katashiro; Kazuya Matsumoto
2003
2003, vol.12, no.3
A new edge-detected lift force flow sensor
Niklas Svedin; Edvard Kalvesten; Goran Stemme
2003
2003, vol.12, no.3
The design and operation of a MEMS differential scanning nanocalorimeter for high-speed heat capacity measurements of ultrathin films
Eric A. Olson; Mikhail Yu. Efremov; Ming Zhang; Zishu Zhang; Leslie H. Allen
2003
2003, vol.12, no.3
Infrared thermal velocimetry in MEMS-based fluidic devices
Jaewon Chung; Costas P. Grigoropoulos; Ralph Greif
2003
2003, vol.12, no.3
Shaped comb fingers for tailored electromechanical restoring force
Brian D. Jensen; Senol Mutlu; Sam Miller; Katsuo Kurabayashi; James J. Allen
2003
2003, vol.12, no.3
Design of large defection electrostatic actuators
John D. Grade; Hal Jerman; Thomas W. Kenny
2003
2003, vol.12, no.3
Low-order modeling of resonance for fixed-valve micropumps based on first principles
Christopher J. Morris; Fred K. Forster
2003
2003, vol.12, no.3
Surface topography evolution and fatigue fracture in polysilicon MEMS structures
Seyed M. Allameh; Pranav Shrotriya; Alex Butterwick; Stuart B. Brown; Wole O. Soboyejo
2003
2003, vol.12, no.3
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