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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2003, vol.12, no.1 2003, vol.12, no.2 2003, vol.12, no.3 2003, vol.12, no.4 2003, vol.12, no.5 2003, vol.12, no.6

题名作者出版年年卷期
Characterization of selective polysilicon deposition for MEMS resonator tuningDaphne Joachim; Liwei Lin20032003, vol.12, no.2
A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensingCollin A. Rich; Kensall D. Wise20032003, vol.12, no.2
A servo-controlled capacitive pressure sensor using a capped-cylinder structure microfabricated by a three-mask processJae-Sung Park; Yogesh B. Gianchandani20032003, vol.12, no.2
Soft-magnetic rotational microwings in an alternating magnetic field applicable to microflight mechanismsNorihisa Miki; Isao Shimoyama20032003, vol.12, no.2
Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beamsAmit Gupta; John P. Denton; Helen McNally; Rashid Bashir20032003, vol.12, no.2
Implantable multichannel electrode array based on SOI technologyKaren C. Cheung; Kaj Djupsund; Yang Dan; Luke P. Lee20032003, vol.12, no.2
Cubic millimeter power inductor fabricated in batch-type wafer technologyMenouer Saidani; Martin A. M. Gijs20032003, vol.12, no.2
Polycrystalline silicon-germanium films for integrated microsystemsAndrea E. Franke; John M. Heck; Tsu-Jae King; Roger T. Howe20032003, vol.12, no.2
Air-channel fabrication for microelectromechanical systems via sacrificial photosensitive polycarbonatesJoseph Paul Jayachandran; Hollie A. Reed; Hongshi Zhen; Larry F. Rhodes; Clifford L. Henderson; Sue Ann Bidstrup Allen; Paul A. Kohl20032003, vol.12, no.2
Integrated micro-heat-pipe fabrication technologyMan Lee; Man Wong; Yitshak Zohar20032003, vol.12, no.2
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