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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2003, vol.12, no.1
2003, vol.12, no.2
2003, vol.12, no.3
2003, vol.12, no.4
2003, vol.12, no.5
2003, vol.12, no.6
题名
作者
出版年
年卷期
Control Mechanism of an Organic Self-Regulating Microfluidic System
Sanghoon Lee; David T. Eddington; Youngmin Kim; Wooseung Kim; David J. Beebe
2003
2003, vol.12, no.6
Etch Rates for Micromachining Processing-Part II
Kirt R. Williams; Kishan Gupta; Matthew Wasilik
2003
2003, vol.12, no.6
Silicon Micromachined Hollow Microneedles for Transdermal Liquid Transport
Han J. G. E. Gardeniers; Regina Luttge; Erwin J. W. Berenschot; Meint J. de Boer; Shuki Y. Yeshurun; Meir Hefetz; Ronny van't Oever; Albert van den Berg
2003
2003, vol.12, no.6
Thermocapillary Actuation of Droplets on Chemically Patterned Surfaces by Programmable Microheater Arrays
Anton A. Darhuber; Joseph P. Valentino; Sandra M. Troian; Sigurd Wagner
2003
2003, vol.12, no.6
Planar CMOS Compatible Process for the Fabrication of Buried Microchannels in Silicon, Using Porous-Silicon Technology
Grigoris Kaltsas; Dimitris Nickos Pagonis; Androula G. Nassiopoulou
2003
2003, vol.12, no.6
High-Voltage Constraints for Vacuum Packaged Microstructures
Chester G. Wilson; Yogesh B. Gianchandani; Amy E. Wendt
2003
2003, vol.12, no.6
Electrolyte-Based On-Demand and Disposable Microbattery
Ki Bang Lee; Liwei Lin
2003
2003, vol.12, no.6
Deformation of Blanketed and Patterned Bilayer Thin-Film Microstructures During Post-Release and Cyclic Thermal Loading
Yanhang Zhang; Martin L. Dunn
2003
2003, vol.12, no.6
Precision Passive Mechanical Alignment of Wafers
Alexander H. Slocum; Alexis C. Weber
2003
2003, vol.12, no.6
Micro-Raman Measurement of Bending Stress in Micromachined Silicon Flexures
V. T. Srikar; Anna K. Swan; M. Selim Unlu; Bennett B. Goldberg; S. Mark Spearing
2003
2003, vol.12, no.6
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