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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



全部

1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2012, vol.21, no.1 2012, vol.21, no.2 2012, vol.21, no.3 2012, vol.21, no.5 2012, vol.21, no.6

题名作者出版年年卷期
Parallel Heterogeneous Integration of Chip-Scale Parts by Self-AssemblyKwang Soon Park; Ji Hao Hoo; Rajashree Baskaran; Karl F. Bohringer20122012, vol.21, no.6
Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using ElectromigrationS. M. Mohanasundaram; Rudra Pratap; Arindam Ghosh20122012, vol.21, no.6
A Low-Flicker-Noise MEMS Electrothermal Displacement Sensing TechniqueA. Mohammadi; M. R. Yuce; S. O. R. Moheimani20122012, vol.21, no.6
Fabrication Process for Integrating Nanoparticles With Released Structures Using Photoresist Replacement of Sublimated p-Dichlorobenzene for Temporary SupportYongha Hwang; Rob N. Candler20122012, vol.21, no.6
A Lithographic Resist-Based Simple Technology for High Yield Microfabrication of Air BridgesS. Jie20122012, vol.21, no.6
Polyethersulfone Membrane Coated With Nanoporous Parylene for UltrafiltrationGunawan Setia Prihandana; Hikaru Ito; Yuya Nishinaka; Yoshihiko Kanno; Norihisa Miki20122012, vol.21, no.6
A 2.8-mm Imaging Probe Based On a High-Fill-Factor MEMS Mirror and Wire-Bonding-Free Packaging for Endoscopic Optical Coherence TomographySean R. Samuelson; Lei Wu; Jingjing Sun; Se-woon Choe; Brian S. Sorg; Huikai Xie20122012, vol.21, no.6
Resonant PZT MEMS Scanner for High-Resolution DisplaysUtku Baran; Dean Brown; Sven Holmstrom; Davide Balma; Wyatt O. Davis; Paul Muralt; Hakan Urey20122012, vol.21, no.6
A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency VibrationsTzeno Galchev; Ethem Erkan Aktakka; Khalil Najafi20122012, vol.21, no.6
Passive Substrate Temperature Compensation of Doubly Anchored Double-Ended Tuning ForksDavid R. Myers; Robert G. Azevedo; Li Chen; Mehran Mehregany; Albert P. Pisano20122012, vol.21, no.6
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