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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2012, vol.21, no.1
2012, vol.21, no.2
2012, vol.21, no.3
2012, vol.21, no.5
2012, vol.21, no.6
题名
作者
出版年
年卷期
A Foldable Microplasma-Generation Device on a Paper Substrate
Cheng-Che Hsu; Jheng-Han Tsai; Yao-Jhen Yang; Ying-Chih Liao; Yen-Wen Lu
2012
2012, vol.21, no.5
Mode-Localized Displacement Sensing
P. Thiruvenkatanathan; A. A. Seshia
2012
2012, vol.21, no.5
Self-Calibration for MEMS With Comb Drives: Measurement of Gap
Fengyuan Li; Jason Vaughn Clark
2012
2012, vol.21, no.5
A Novel Micromachined Claw Probe for the Electrical Testing of Microsolder Ball
Chingfu Tsou; Tengshian Lai; Chenghan Huang
2012
2012, vol.21, no.5
Characterization of a Mechanical Motion Amplifier Applied to a MEMS Accelerometer
Ioannis Zeimpekis; Ibrahim Sari; Michael Kraft
2012
2012, vol.21, no.5
MEMS Acceleration Sensor With Large Dynamic Range and High Sensitivity
Ezzat G. Bakhoum; Marvin H. M. Cheng
2012
2012, vol.21, no.5
Laser-Driven Micro Transfer Placement of Prefabricated Microstructures
Reza Saeidpourazar; Rui Li; Yuhang Li; Michael D. Sangid; Chaofeng Lu; Yonggang Huang; John A. Rogers; Placid M. Ferreira
2012
2012, vol.21, no.5
Effects of Prestrain Applied to a Polyethylene Terephthalate Substrate Before the Coating of Al-Doped ZnO Film on Film Quality, Electrical Properties, and Pop-In Behavior During Nanoindentation
Tse-Chang Li; Chang-Fu Han; Bo-Hsiung Wu; Po-Tsung Hsieh; Jen-Fin Lin
2012
2012, vol.21, no.5
Self-Enclosed Nanofiber-Reinforced PDMS Channels Using Ultrafast Laser Irradiation
Hamsapriya Selvaraj; Bo Tan; Krishnan Venkatakrishnan
2012
2012, vol.21, no.5
Batch Transfer of Radially Expanded Die Arrays for Heterogeneous Integration Using Different Wafer Sizes
Fredrik Forsberg; Niclas Roxhed; Tommy Haraldsson; Yitong Liu; Goran Stemme; Frank Niklaus
2012
2012, vol.21, no.5
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