长垣产业园区科技文献服务平台
主页
文献资源
外文期刊
外文会议
中文期刊
专业机构
起重机械
智能制造
高级检索
关于我们
版权声明
使用帮助
期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2012, vol.21, no.1
2012, vol.21, no.2
2012, vol.21, no.3
2012, vol.21, no.5
2012, vol.21, no.6
题名
作者
出版年
年卷期
Mechanical Design and Characterization for MEMS Thin-Film Packaging
Fabio Santagata; Jeroen J. M. Zaal; Victor Gonzalez Huerta; Luigi Mele; J. Fredrik Creemer; Pasqualina M. Sarro
2012
2012, vol.21, no.1
RF MEMS Fractal Capacitors With High Self-Resonant Frequencies
Amro M. Elshurafa; Ahmed G. Radwan; Ahmed Emira; Khaled N. Salama
2012
2012, vol.21, no.1
Poly-SiGe-Based MEMS Thin-Film Encapsulation
Bin Guo; Bo Wang; Lianggong Wen; Philippe Helin; Gert Claes; Jeroen De Coster; Bert Du Bois; Agnes Verbist; Rita Van Hoof; Guy Vereecke; Luc Haspeslagh; Harrie A. C. Tilmans; Stefaan Decoutere; Haris Osman; Robert Puers; Ingrid De Wolf; Shuji Tanaka
2012
2012, vol.21, no.1
A Thermoelectric Power Sensor and Its Package Based on MEMS Technology
De-Bo Wang; Xiao-Ping Liao; Tong Liu
2012
2012, vol.21, no.1
Novel First-Level Interconnect Techniques for Flip Chip on MEMS Devices
Jemmy Sutanto; Sindhu Anand; Chetan Patel; Jit Muthuswamy
2012
2012, vol.21, no.1
A 2 Degree-of-Freedom SOI-MEMS Translation Stage With Closed-Loop Positioning
Bonjin Koo; Xuemeng Zhang; Jingyan Dong; Srinivasa M. Salapaka; Placid M. Ferreira
2012
2012, vol.21, no.1
Parametric Study of Zigzag Microstructure for Vibrational Energy Harvesting
M. Amin Karami; Daniel J. Inman
2012
2012, vol.21, no.1
An Analytical Capacitance Model of Temperature-Sensitive, Large-Displacement Multimorph Cantilevers: Numerical and Experimental Validation
Sean Scott; Jeong-Il Kim; Farshid Sadeghi; Dimitrios Peroulis
2012
2012, vol.21, no.1
Cylindrical Surfaces Enable Wavelength-Selective Extinction and Sub-0.2 nm Linewidth in 250 μm-Gap Silicon Fabry-Perot Cavities
Maurine Malak; Frederic Marty; Nicolas Pavy; Yves-Alain Peter; Ai-Qun Liu; Tarik Bourouina
2012
2012, vol.21, no.1
Fabrication and Analysis of a MEMS NIR Fabry-Perot Interferometer
Timothy J. Russin; Maxwell Kerber; Alicia Russin; Andrew Wang; Richard Waters
2012
2012, vol.21, no.1
1
2
3
国家科技图书文献中心
全球文献资源网
京ICP备05055788号-26
机械工业信息研究院 2018-2024