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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2009, vol.18, no.1
2009, vol.18, no.2
2009, vol.18, no.3
2009, vol.18, no.4
2009, vol.18, no.5
2009, vol.18, no.6
题名
作者
出版年
年卷期
A Sensing Device Using Liquid Crystal in a Micropillar Array Supporting Structure
Darning Cheng; Sudheer S. Sridharamurthy; Jacob T. Hunter; Joon-Seo Park; Nicholas L. Abbott; Hongrui Jiang
2009
2009, vol.18, no.5
MEMS Electric-Field Probes for Laboratory Plasmas
Janet A. Stillman; Franklin C. Chiang; Patrick Pribyl; Walter Gekelman; Mio Nakamoto; Jack W. Judy
2009
2009, vol.18, no.5
A Liquid-Solid Direct Contact Low-Loss RF Micro Switch
Prosenjit Sen; Chang-Jin Kim
2009
2009, vol.18, no.5
A Nanoparticle Doped Miero-Geiger Counter for Multispecies Radiation Detection
Chad Whitney; Scott M. Pellegrin; Chester Wilson
2009
2009, vol.18, no.5
An Electrothermal Tip-Tilt-Piston Micromirror Based on Folded Dual S-Shaped Bimorphs
Kemiao Jia; Sagnik Pal; Huikai Xie
2009
2009, vol.18, no.5
A Numerical Fatigue Damage Model for Life Scatter of MEMS Devices
Behrooz Jalalahmadi; Farshid Sadeghi; Dimitrios Peroulis
2009
2009, vol.18, no.5
Optimization of Comb-Driven Devices for Mechanical Testing of Polymeric Nanofibers Subjected to Large Deformations
Mohammad Naraghi; Ioannis Chasiotis
2009
2009, vol.18, no.5
Dual-Chirality Helical Nanobelts: Linear-to-Rotary Motion Converters for Three-Dimensional Microscopy
Lixin Dong; Li Zhang; Bradley E. Kratochvil; Kaiyu Shou; Bradley J. Nelson
2009
2009, vol.18, no.5
Characterization of High-Pressure XeF_2 Vapor-Phase Silicon Etching for MEMS Processing
Clayton Easter; Chad B. O'Neal
2009
2009, vol.18, no.5
Wafer-Scale Microtensile Testing of Thin Films
Joao Gaspar; Marek E. Schmidt; Jochen Held; Oliver Paul
2009
2009, vol.18, no.5
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