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期刊


ISSN1057-7157
刊名Journal of Microelectromechanical Systems
参考译名微机电系统杂志
收藏年代1998～2013



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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013

2009, vol.18, no.1 2009, vol.18, no.2 2009, vol.18, no.3 2009, vol.18, no.4 2009, vol.18, no.5 2009, vol.18, no.6

题名作者出版年年卷期
High-Precision Digital-to-Analog Tunable Capacitors With Improved Quality Factor Using a Parallel Digital Actuator ArrayWon Han; Young-Ho Cho20092009, vol.18, no.4
Self-Assembly Based on Chromium/Copper BilayersPawan Tyagi; Noy Bassik; Timothy G. Leong; Jeong-Hyun Cho; Bryan R. Benson; David H. Gracias20092009, vol.18, no.4
Serially Connected Weight-Balanced Digital Actuators for Wide-Range High-Precision Low-Voltage-Displacement ControlJae Yong Lee; Won Chul Lee; Young-Ho Cho20092009, vol.18, no.4
Energetic Nanoporous Silicon DevicesLuke J. Currano; Wayne A. Churaman20092009, vol.18, no.4
Whole-Cell Impedance Analysis for Highly and Poorly Metastatic Cancer CellsYounghak Cho; Hyun Soo Kim; A. Bruno Frazier; Zhuo G. Chen; Dong Moon Shin; Aram Han20092009, vol.18, no.4
Switched-Layer Design for SOI Bulk Micromachined XYZ Stage Using Stiction Bar for Interlayer Electrical ConnectionKazuhiro Takahashi; Makoto Mita; Hiroyuki Fujita; Hiroshi Toshiyoshi20092009, vol.18, no.4
MEMS Mechanical Fatigue: Experimental Results on Gold MicrobeamsAurelio Soma; Giorgio De Pasquale20092009, vol.18, no.4
Reducing Anchor Loss in MEMS Resonators Using Mesa IsolationManoj Pandey; Robert B. Reichenbach; Alan T. Zehnder; Amit Lal; Harold G. Craighead20092009, vol.18, no.4
New Generation of Digital Microfluidic DevicesJakub Kedzierski; Shaun Berry; Behrouz Abedian20092009, vol.18, no.4
Thermal Bubble Microfluidic Gate Based on SOI WaferChingfu Tsou; Chenghan Huang20092009, vol.18, no.4
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