长垣产业园区科技文献服务平台
主页
文献资源
外文期刊
外文会议
中文期刊
专业机构
起重机械
智能制造
高级检索
关于我们
版权声明
使用帮助
期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2009, vol.18, no.1
2009, vol.18, no.2
2009, vol.18, no.3
2009, vol.18, no.4
2009, vol.18, no.5
2009, vol.18, no.6
题名
作者
出版年
年卷期
Wear of Polysilicon Surface Micromachines Operated in High Vacuum
Shannon J. Timpe; Daan Hein Alsem; D. Adam Hook; Michael T. Dugger; Kyriakos Komvopoulos
2009
2009, vol.18, no.2
Material Selection for Optimal Design of Thermally Actuated Pneumatic and Phase Change Microactuators
Prasanna Srinivasan; S. Mark Spearing
2009
2009, vol.18, no.2
Frictional Aging and Sliding Bifurcation in Monolayer-Coated Micromachines
Alex D. Corwin; Maarten P. de Boer
2009
2009, vol.18, no.2
Effect of Die-Bonding Process on MEMS Device Performance: System-Level Modeling and Experimental Verification
Jing Song; Qing-An Huang; Ming Li; Jie-Ying Tang
2009
2009, vol.18, no.2
Comparison of Au and Au-Ni Alloys as Contact Materials for MEMS Switches
Zhenyin Yang; Daniel J. Lichtenwalner; Arthur S. Morris, III; Jacqueline Krim; Angus I. Kingon
2009
2009, vol.18, no.2
Free-Form Simulation of Sequential Etching and Surface Characterization for 3-D MEMS Fabrication
Santhosh K. George; Bahattin Koc
2009
2009, vol.18, no.2
Double-Exposure Grayscale Photolithography
Lance Mosher; Christopher M. Waits; Brian Morgan; Reza Ghodssi
2009
2009, vol.18, no.2
Variable-Size Solder Droplets by a Molten-Solder Ejection Method
Yoshinori Yokoyama; Kazuyo Endo; Toshihiro Iwasaki; Hiroshi Fukumoto
2009
2009, vol.18, no.2
Electrical/Mechanical Modeling, Reliability Assessment, and Fabrication of FlexConnects: A MEMS-Based Compliant Chip-to-Substrate Interconnect
Karan Kacker; Suresh K. Sitaraman
2009
2009, vol.18, no.2
Precision In-Plane Hand Assembly of Bulk-Microfabricated Components for High-Voltage MEMS Arrays Applications
Blaise Gassend; Luis Fernando Velasquez-Garcia; Akintunde Ibitayo Akinwande
2009
2009, vol.18, no.2
1
2
3
国家科技图书文献中心
全球文献资源网
京ICP备05055788号-26
机械工业信息研究院 2018-2024