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期刊
ISSN
1057-7157
刊名
Journal of Microelectromechanical Systems
参考译名
微机电系统杂志
收藏年代
1998~2013
全部
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2009, vol.18, no.1
2009, vol.18, no.2
2009, vol.18, no.3
2009, vol.18, no.4
2009, vol.18, no.5
2009, vol.18, no.6
题名
作者
出版年
年卷期
Wafer-Scale Manufacturing of Bulk Shape-Memory-Alloy Microactuators Based on Adhesive Bonding of Titanium-Nickel Sheets to Structured Silicon Wafers
Stefan Braun; Niklas Sandstrom; Goran Stemme; Wouter van der Wijngaart
2009
2009, vol.18, no.6
Stochastic Analysis of Electrostatic MEMS Subjected to Parameter Variations
Nitin Agarwal; Narayana R. Alum
2009
2009, vol.18, no.6
MEMS Vibration Energy Harvesting Devices With Passive Resonance Frequency Adaptation Capability
Marcin Marzencki; Maxime Defosseux; Skandar Basrour
2009
2009, vol.18, no.6
Field-Concentrator-Based Resonant Magnetic Sensor With Integrated Planar Coils
Simon Brugger; Oliver Paul
2009
2009, vol.18, no.6
Efficient Energy Harvesting from Irregular Mechanical Vibrations by Active Motion Control
Hiroshi Okamoto; Teppei Onuki; Sumito Nagasawa; Hiroki Kuwano
2009
2009, vol.18, no.6
Temperature-Insensitive Composite Micromechanical Resonators
Renata Melamud; Saurabh A. Chandorkar; Bongsang Kim; Hyung Kyu Lee; James C. Salvia; Gaurav Bahl; Matthew A. Hopcroft; Thomas W. Kenny
2009
2009, vol.18, no.6
Internal Dielectric Transduction in Bulk-Mode Resonators
Dana Weinstein; Sunil A. Bhave
2009
2009, vol.18, no.6
Nonlinear Dynamics of a Micromechanical Torsional Resonator: Analytical Model and Experiments
Dario Antonio; Hernan Pastoriza
2009
2009, vol.18, no.6
Modeling, Design, Fabrication, and Demonstration of a Digital Micromirror With Interdigitated Cantilevers
Dae-Hyun Kim; Min-Wu Kim; Jin-Wan Jeon; Koeng Su Lim; Jun-Bo Yoon
2009
2009, vol.18, no.6
A Monolithic Dual-Golor Total-Internal-Reflection-Based Chip for Highly Sensitive and High-Resolution Dual-Fluorescence Imaging
Nam Cao Hoai Le; Dzung Viet Dao; Ryuji Yokokawa; John C. Wells; Susumu Sugiyama
2009
2009, vol.18, no.6
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